Laser Interface Bonding for Room-Temperature Transparent Substrates

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Solution Overview

Problem

Current bonding techniques for transparent substrates, such as glass-to-glass, glass-to-plastic, and glass-to-ceramic, require high temperatures, are sensitive to environmental particles, and result in non-robust, chemically reactive bond lines that can harm biological materials and cause warping or failure upon temperature changes.

Innovation Solution

A room temperature laser bonding process using a substrate with a heat absorption layer that absorbs laser energy, creating a localized high temperature to fuse the substrates without heating the bulk material, allowing for bonding through 100 nm particles and maintaining chemical inertness and optical transparency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If fusion bonding is used to bond glass-to-glass substrates, then strong bonding is achieved, but the process is highly sensitive to environmental particles causing bubbles and defects

Engineering Contradiction:
Improvebond strengthVSAvoidbonding yield
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent applies local quality by creating a localized heat-affected zone at the bonding interface using a moving laser beam. Only the immediate bonding region is heated to melting temperature, while the bulk substrates remain at room temperature. This localized approach allows bonding through particles without requiring absolute surface cleanliness across the entire substrate surface.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the temperature parameter from bulk heating (requiring temperatures above the glass transition temperature) to localized heating at the interface. The laser beam creates a moving molten zone that fuses materials locally, allowing bonding at room temperature overall while achieving strong bonds locally through controlled parameter changes in the heat-affected zone.

Inventive Principle:
Principle #35Parameter changes

2Strength

If high temperature fusion bonding is used, then bonding is achieved, but surface distortion and hazening occur requiring reprocessing

Engineering Contradiction:
Improvebond strengthVSAvoidsurface optical quality
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent applies local quality by confining the thermal effect to a narrow zone at the bonding interface. The laser beam creates a localized molten region that is immediately cooled by the surrounding room temperature substrate, preventing heat diffusion to broader areas. This localized heating avoids bulk thermal expansion and contraction that cause surface distortion and optical hazening.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses a moving laser beam that rapidly traverses the bonding interface, creating a moving molten zone that solidifies immediately behind it. This rapid passage through the material prevents prolonged thermal exposure that would cause heat diffusion and surface distortion, allowing the laser to 'rush through' the bonding process before thermal damage can occur.

Inventive Principle:
Principle #21Skipping (Rushing through)

3Strength

If anodic bonding is used for glass-to-silicon, then bonding is achieved, but sodium depletion creates positive charge on glass surface interfering with downstream processes

Engineering Contradiction:
Improvebond strengthVSAvoidsurface charge
Core Design Contradiction:
StrengthVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the electrochemical mechanism of anodic bonding (which relies on ion migration and electrostatic attraction) with a thermal melting mechanism. The laser-induced molten zone creates bonds through material fusion rather than ionic migration, eliminating the charge separation and sodium depletion that create harmful surface charges in anodic bonding processes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Ease of manufacture

If adhesive bonding is used for glass-to-glass, then bonding is easy to apply, but bubble-free joints and complete bonding lines are difficult to achieve and adhesives can harm biological materials

Engineering Contradiction:
Improvebonding easeVSAvoidbubble-free bonding
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces adhesive bonding (which relies on chemical adhesion at the interface) with direct fusion bonding through a laser-induced molten zone. This eliminates the need for adhesive materials that can trap bubbles or harm biological samples, creating direct material-to-material bonds through localized melting and solidification that naturally exclude air and contaminants.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This process enables rapid bonding with high precision, tolerance to contaminants, and the ability to bond dissimilar materials with different thermal expansion coefficients, while maintaining the integrity of biological samples and avoiding surface distortion or etching.

Implementation Method 1

A room temperature laser bonding process using a substrate with a heat absorption layer that absorbs laser energy, creating a localized high temperature

Methodology Applied
Scientific EffectLaser absorption: Absorption (EM radiation)

Implementation Method 2

The first and second substrates immediately adjacent the interface are softened with diffusion across the interface to fuse the substrates

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 3

creating a localized high temperature at the interface from energy supplied by the laser

Methodology Applied
Scientific EffectLaser heating: Laser

Data Source

PatentUS11571860B2Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding
Publication Date: 2023.02.07 CORNING INC
  • US11571860B2 patent drawing
  • US11571860B2 patent drawing
  • US11571860B2 patent drawing

AI summary

A process for room temperature substrate bonding employs a first substrate substantially transparent to a laser wavelength is selected. A second substrate for mating at an interface with the first substrate is then selected. A transmissivity change at the interface is created and the first and second substrates are mated at the interface. The first substrate is then irradiated with a laser of the transparency wavelength substantially focused at the interface and a localized high temperature at the interface from energy supplied by the laser is created. The first and second substrates immediately adjacent the interface are softened with diffusion across the interface to fuse the substrates.