Laser Interferometry Position Detection System
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Solution Overview
Problem
Existing laser light interferometry detection systems for high precision positioning and displacements in semiconductor and integrated circuit manufacturing have limited accuracy and occupy valuable work volume, leading to inefficiencies and complex adjustments.
Innovation Solution
A position detection system using laser light interferometry with simplified optics, where the Y laser light beam is directed parallel to the XY plane and the Z laser light beam is directed under an angle α relative to the XY plane, eliminating the need for additional Z measuring mirrors and reducing constructional dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional Z measuring mirrors are positioned within the working space to enable multiple DOF measurements, then measurement capability is improved, but work volume occupancy increases and measurement accuracy deteriorates
Solution Approach 1:
The patent extracts the Z measuring mirror from the working space and repositions it to the holder periphery. This removes the obstacle from the measurement path, eliminating the need for additional optical reflections while maintaining full measurement capability. The extraction principle directly resolves the contradiction by removing the source of accuracy degradation while preserving adaptability.
Solution Approach 2:
The patent changes the spatial arrangement by positioning the Z measuring mirror in a different dimensional location (periphery of holder rather than within working space). This dimensional repositioning allows the laser beam to access the mirror without passing through the working space, thereby maintaining measurement accuracy while preserving the ability to measure multiple degrees of freedom.
2Adaptability or versatility
If additional Z measuring mirrors are positioned within the working space, then multiple DOF measurements are enabled, but device complexity increases
Solution Approach 1:
By extracting the Z measuring mirror from the working space and relocating it to the holder periphery, the patent eliminates the need for intermediate optical components and multiple reflection paths. This simplification reduces device complexity while maintaining the capability to perform multiple DOF measurements through the repositioned mirror.
3Adaptability or versatility
If additional Z measuring mirrors are positioned within the working space, then measurements can be performed, but adjustment complexity increases
Solution Approach 1:
The patent extracts the Z measuring mirror from the complex working space environment and relocates it to the holder periphery, where it can be accessed and adjusted more easily. This removal from the dense optical path eliminates the need for complex alignment procedures among multiple mirrors, significantly improving ease of adjustment while preserving measurement capability.
4Adaptability or versatility
If additional Z measuring mirrors are positioned within the working space, then measurements are possible, but angular range of holder is reduced
Solution Approach 1:
By extracting the Z measuring mirror from the working space and positioning it at the holder periphery, the patent removes the geometric constraints that limited the holder's angular range. The repositioned mirror can accommodate larger angular movements without interfering with the working space or requiring complex beam path adjustments, thereby increasing the angular range while maintaining measurement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves measurement accuracy, reduces work volume occupancy, simplifies adjustments, and allows for a larger angular range of the holder, enhancing the overall performance of the detection system.
Implementation Method 1
each optical device structured to emit and direct an X, Y or Z laser light beam to and from a respective X, Y or Z measuring mirror and structured to detect and convert at least part of the X, Y or Z laser light beams reflected by the respective X, Y or Z measuring mirrors into electric measuring signals
Implementation Method 2
structured to detect and convert at least part of the X, Y or Z laser light beams reflected by the respective X, Y or Z measuring mirrors into electric measuring signals
Data Source
AI summary
According to the disclosure, a position detection system using laser light interferometry is proposed, capable of measuring the positions and displacements of an object relative to and within an XYZ system of coordinates, the system using a holder comprising a mounting surface for the object, the mounting surface being oriented in the XY plane of the XYZ system of coordinates, several X, Y and Z measuring mirrors as well as a plurality of X, Y, and Z optical devices, each optical device structured to emit and direct an X, Y or Z laser light beam to and from a respective X, Y or Z measuring mirror and structured to detect and convert at least part of the X, Y or Z laser light beams reflected by the respective X, Y or Z measuring mirrors into electric measuring signals, the electric measuring signals comprising at least information as to the X, Y and Z position of the object, wherein, for measuring the Z position of the object, the at least one Y laser light beam is directed parallel to the XY plane to and from a Y measuring mirror positioned perpendicular to the XY plane and the at least one Z laser light beam is directed under an angle α relative to the XY plane to and from a Z measuring mirror.By directing the Y laser light beam parallel to the XY plane to and from a Y measuring mirror positioned perpendicular to the XY plane and directing the Z laser light beam under an angle α relative to the XY plane to and from a Z measuring mirror, the optics of the position detection system can be simplified as any additional Z measuring mirror can be obviated. Particularly, this results in less occupied work volume in the direct vicinity where semiconductor and integrated circuit manufacturing processes.