Laser Ion Source Vacuum Target Exchange

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Solution Overview

Problem

Laser ion sources face challenges in continuously operating without damaging the vacuum condition when exchanging solid targets, as existing methods require releasing the ion source to the atmosphere, disrupting the vacuum and necessitating a special device for target supply.

Innovation Solution

A laser ion source configuration with a vacuum-exhausted ion generation chamber, a valve for controlled access, a target supply chamber for independent vacuum management, and a transportation unit that maintains vacuum integrity during target exchange by opening the valve only during transportation and closing it otherwise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the laser ion source is released to the atmosphere whenever supplying the solid target, then the target can be supplied (exchanged), but the vacuum condition in the space where the target is set is damaged

Engineering Contradiction:
Improvetarget supplyVSAvoidvacuum condition
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The system is divided into two separate chambers: a first chamber for ion generation and a second chamber for target storage. This segmentation allows the target to be supplied in the second chamber without releasing the first chamber to the atmosphere, thus maintaining the vacuum condition while enabling target exchange operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A transfer mechanism acts as an intermediary between the target storage chamber and the ion generation chamber. The target is transferred through this intermediary system without requiring the ion generation chamber to be exposed to atmospheric pressure, thereby preserving the vacuum environment while enabling target supply.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a special device is required to supply the target, then the vacuum condition is maintained, but the device complexity increases

Engineering Contradiction:
Improvevacuum conditionVSAvoidtarget supply device
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

By segmenting the system into separate chambers for ion generation and target storage, the complexity of the vacuum maintenance system is reduced. Each chamber can be independently managed, requiring simpler vacuum control mechanisms compared to a single complex chamber that would need to maintain vacuum during target exchange operations.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables consecutive target supply without compromising the vacuum condition, ensuring stable operation and maintaining high-density ion beam generation.

Implementation Method 1

ionizes the solid target by energy of the laser beam

Methodology Applied
Scientific EffectLaser irradiation ionization: Photoionisation

Implementation Method 2

electrostatically extracts the ions to generate an ion beam

Methodology Applied
Scientific EffectElectrostatic extraction: Electrostatics

Data Source

PatentUS9251991B2Laser ion source
Publication Date: 2016.02.02 KK TOSHIBA
  • US9251991B2 patent drawing
  • US9251991B2 patent drawing
  • US9251991B2 patent drawing

AI summary

According to one embodiment, there is provided a laser ion source. The laser ion source includes a vacuum chamber which is vacuum-exhausted and in which a target is transported and set, a valve which is opened when the target is transported into the vacuum chamber and is closed except for the transportation, a target supply chamber which holds the target to be movable, and a transportation unit which transports to the vacuum chamber the target held on the target supply chamber while opening the valve after the target supply chamber is vacuum-exhausted while closing the valve.