Laser Machining Axicon Lens Spatial Light Modulator

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Solution Overview

Problem

Conventional laser processing devices face challenges in improving processing quality, specifically in achieving straightness and bending strength of cut sections while minimizing damage to the laser light entrance and opposite surfaces.

Innovation Solution

A laser processing device and method that form a vertically long modified region by using a spatial light modulator to display an axicon lens pattern, creating converging points close together along the laser irradiation direction, thereby reducing fractures and maintaining energy density, while restraining the pattern for entrance-surface-side and opposite-surface-side regions to prevent damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a vertically long converging part is formed to create a vertically long modified region, then the amount of fractures decreases and processing quality improves, but energy density decreases causing the modified region to fail to form or consume large energy

Engineering Contradiction:

Improveprocessing qualityVSAvoidenergy density

Core Design Contradiction:

Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The patent divides the modified region into three distinct segments: an entrance-surface-side modified region, an opposite-surface-side modified region, and a middle modified region. Each segment is formed with different spatial light modulator patterns to optimize local characteristics. The middle modified region uses an axicon lens pattern to create multiple converging points along the irradiation direction, forming a vertically elongated structure that reduces fractures while the entrance and opposite surface regions use different patterns to maintain energy density and prevent surface damage.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent applies different modulation patterns to different regions of the object along the laser irradiation path. The entrance-surface-side and opposite-surface-side regions use patterns that prevent surface damage, while the middle region uses an axicon lens pattern that creates a vertically long modified region. This local differentiation allows each region to have optimized properties for its specific function, resolving the contradiction between energy density and modified region formation.

Inventive Principle:

Principle #3Local quality

2Manufacturing precision

If a vertically long modified region is formed to improve straightness and bending strength, then cut quality improves, but damage to laser light entrance surface and opposite surface increases

Engineering Contradiction:

Improvestraightness in cut sectionsVSAvoidsurface damage

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent divides the modified region into three distinct segments: an entrance-surface-side modified region, an opposite-surface-side modified region, and a middle modified region. Each segment is formed with different spatial light modulator patterns to optimize local characteristics. The middle modified region uses an axicon lens pattern to create multiple converging points along the irradiation direction, forming a vertically long modified region that reduces fractures while the entrance and opposite surface regions use different patterns to maintain energy density and prevent surface damage.

Inventive Principle:

Principle #1Segmentation

3Strength

If a vertically long modified region is formed to reduce fractures, then bending strength improves, but energy consumption increases

Engineering Contradiction:

Improvebending strengthVSAvoidenergy consumption

Core Design Contradiction:

StrengthVSUse of energy by stationary object

Solution Approach 1:

The patent divides the modified region into three distinct segments: an entrance-surface-side modified region, an opposite-surface-side modified region, and a middle modified region. Each segment is formed with different spatial light modulator patterns to optimize local characteristics. The middle modified region uses an axicon lens pattern to create multiple converging points along the irradiation direction, forming a vertically long modified region that reduces fractures while the entrance and opposite surface regions use different patterns to maintain energy density and prevent surface damage.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent changes the modulation pattern parameter displayed on the spatial light modulator depending on the region being processed. The axicon lens pattern creates a specific energy distribution that forms a vertically long modified region in the middle section, while different patterns are used for the entrance and opposite surface regions. This parameter change allows optimization of energy consumption by matching the modulation pattern to the specific requirements of each region.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach enhances processing quality by reducing fractures and improving straightness and bending strength, while maintaining energy density and preventing surface damage, effectively addressing the limitations of conventional techniques.

Implementation Method 1

a spatial light modulator modulating laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object

Methodology Applied

Scientific EffectLight modulation and convergence: Lens

Implementation Method 2

when forming the middle modified region, the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction

Methodology Applied

Scientific EffectAxicon lens effect: Lens

Implementation Method 3

converge laser light at an object to be processed so as to form a plurality of rows of modified regions along a laser light irradiation direction within the object along a line to cut

Methodology Applied

Scientific EffectLaser heating and material modification: Laser

Data Source

PatentUS9902017B2Laser machining device and laser machining method

Publication Date: 2018.02.27 HAMAMATSU PHOTONICS KK

AI summary

A laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. A plurality of rows of modified regions include at least an entrance-surface-side modified region located on the laser light entrance surface side, an opposite-surface-side modified region located on the opposite surface side of the laser light entrance surface, and a middle modified region located between the entrance-surface-side modified region and opposite-surface-side modified region. When forming the middle modified region, the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction. When forming the entrance-surface-side modified region and opposite-surface-side modified region, the spatial light modulator is restrained from displaying the axicon lens pattern as the modulation pattern.