Laser Optical Element Drying for Stable Processing Accuracy
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Solution Overview
Problem
Laser processing apparatuses face productivity issues due to the deterioration of optical elements caused by water absorption, leading to decreased processing quality and increased downtime for maintenance.
Innovation Solution
A laser processing apparatus with a detecting unit to monitor water retention in optical elements and a drying unit to dry them when necessary, ensuring continuous operation and high accuracy processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If optical elements are used in laser processing apparatus, then processing accuracy can be improved, but the optical elements deteriorate due to water absorption leading to decreased processing quality and increased maintenance downtime
Solution Approach 1:
The patent applies the inert atmosphere principle by introducing a drying unit that creates a low-humidity environment around optical elements. The drying unit includes a heater to evaporate water and a blower to remove moisture, effectively creating a protective environment that prevents water absorption by optical elements while maintaining their high precision performance
Solution Approach 2:
The patent implements preliminary action by proactively detecting water retention in optical elements using a detecting unit before it causes significant deterioration. The system performs preliminary drying treatment when water retention exceeds a threshold, preventing the degradation of processing quality before it occurs
2Manufacturing precision
If optical elements are frequently replaced and maintained, then processing quality can be maintained, but downtime increases and productivity decreases
Solution Approach 1:
The patent applies self-service principle by enabling the optical elements to maintain their own performance through automated monitoring and drying. The detecting unit continuously monitors water retention, and the drying unit automatically removes moisture when needed, eliminating the need for frequent manual maintenance and replacement while sustaining processing quality
Solution Approach 2:
The patent implements feedback mechanism where the detecting unit provides real-time information about water retention status to the control unit, which then activates the drying unit when necessary. This closed-loop feedback system ensures processing quality is maintained while minimizing downtime by only performing drying treatment when actually needed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus maintains high accuracy and reduces downtime by automatically detecting and addressing water retention in optical elements, thereby improving productivity.
Implementation Method 1
a detecting unit that detects a water retention state of any of the first optical element of the laser oscillator, the characteristic conversion optical element, and the second optical element
Implementation Method 2
a drying unit that dries any of the first optical element of the laser oscillator, the characteristic conversion optical element, and the second optical element
Implementation Method 3
as the wavelength conversion optical element for outputting a DUV laser beam, a cesium lithium borate (CLBO: CsLiB6O10) crystal has been used
Data Source
AI summary
A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator that emits a laser beam, a characteristic conversion optical element that converts a characteristic of the laser beam emitted from the laser oscillator, a mirror and a collecting lens that are optical elements that guide the laser beam to a workpiece, a detecting unit that detects the water retention state of the characteristic conversion optical element, and a drying unit that dries the characteristic conversion optical element.