Laser Particle Detection on Modulator Surfaces
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Solution Overview
Problem
Existing inspection methods for surface particles on modulators used in detecting defects in electrical circuits lack confirmation of particle removal and accurate location detection, leading to potential damage and reduced accuracy.
Innovation Solution
A system comprising a modulator, a laser source, mirrors, and a processor that emits and redirects laser light to detect changes in intensity caused by surface particles, allowing for precise determination of the X-Y location of particles, and an air knife for removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If periodic cleaning of the modulator is performed, then the modulator surface is cleaned, but there is no confirmation that foreign substances have been removed
Solution Approach 1:
The system implements feedback by detecting particles before and after cleaning operations. The laser-based detection system provides real-time information about particle presence and location, allowing the system to verify whether cleaning has been effective and to track particle removal status.
Solution Approach 2:
The patent replaces mechanical cleaning verification methods with an optical detection system. Instead of relying on mechanical inspection or visual confirmation, the system uses laser light interaction with particles to detect their presence, position, and removal status non-contactively.
2Measurement precision
If existing detection methods are used, then foreign substances can be detected, but their location cannot be determined to confirm removal or diagnose issues
Solution Approach 1:
The system transitions from simple presence/absence detection to two-dimensional location mapping. By using a laser sheet that illuminates a specific plane and detecting the position of scattered light within that plane, the system determines both X and Y coordinates of particles, enabling precise spatial localization.
Solution Approach 2:
The patent replaces conventional detection methods with laser-based optical detection. The laser light interacts with particles through scattering and absorption, and the resulting intensity changes are converted into positional information, providing precise location data without mechanical contact.
3Productivity
If particles are present between the glass panel and modulator, then inspection can proceed, but damage may occur and accuracy is reduced
Solution Approach 1:
The system performs preliminary detection of particles before the inspection process begins. By identifying and locating particles in advance, the system can alert operators to clean the modulator surface, preventing potential damage and ensuring accurate inspection results from the start.
Solution Approach 2:
The system provides continuous feedback about particle presence during the inspection process. This real-time information allows operators to take corrective action (cleaning) when particles are detected, maintaining both productivity and reliability by preventing damage while minimizing inspection interruptions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection and removal of surface particles, ensuring effective cleaning and diagnosing system-level issues, thereby enhancing inspection accuracy and preventing damage.
Implementation Method 1
detecting, by a laser sensor positioned adjacent to the first side of the modulator, a first change in intensity of the laser light received from the laser source when a particle on the surface of the modulator passes through the laser light emitted by the laser source
Implementation Method 2
detecting, by a laser sensor positioned adjacent to the first side of the modulator, a first change in intensity of the laser light received from the laser source when a particle on the surface of the modulator passes through the laser light emitted by the laser source
Implementation Method 3
The at least one mirror may be configured to redirect the laser light toward the first side of the modulator at a second angle relative to the first direction
Data Source
AI summary
A system including a modulator, a laser source, a mirror, a laser sensor, and a processor. The modulator is movable in a first direction. The laser source is configured to emit laser light in a direction parallel to the surface of the modulator. The mirror is configured to redirect the laser light. The laser sensor is configured to detect a first change in intensity when a particle on the surface of the modulator passes through the laser light emitted by the laser source. The laser sensor is further configured to detect a second change in intensity when the particle on the surface of the modulator passes through the laser light redirected by the at least one mirror. The processor is configured to determine an X-Y location of the particle based on the first change in intensity and the second change in intensity.