Laser Scanner Inspection Using Processing Mark Imaging
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Solution Overview
Problem
Existing laser processing apparatuses face issues with insufficient breaking of the buffer layer during laser lift-off processing due to stains, deterioration, or malfunctions in the laser beam scanning unit, leading to increased costs from frequent replacements.
Innovation Solution
An inspection method is introduced that includes a laser processing step on an inspection substrate, an imaging step to capture processing marks, and a determination step to identify abnormalities in the laser beam scanning unit based on the image analysis. This method allows for the detection of abnormalities before applying laser processing to a workpiece, enabling adjustments to processing conditions to mitigate the effects of these abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the laser beam scanning unit is replaced with a new one to eliminate stains and deterioration, then processing performance is improved, but cost increases
Solution Approach 1:
The patent performs preliminary inspection of the laser beam scanning unit by scanning an inspection substrate and analyzing the processed patterns before actual production. This allows detection of abnormalities such as stains or deterioration in mirrors and lenses, enabling preventive maintenance or processing condition adjustments before costly failures occur during production, thus avoiding both replacement costs and production losses
Solution Approach 2:
The system uses image processing to analyze the patterns formed on the inspection substrate and provides feedback about the scanning unit's condition. Based on this feedback, the processing conditions can be adjusted to compensate for detected abnormalities, maintaining processing performance without requiring expensive hardware replacement
2Loss of substance
If the laser beam scanning unit is used despite existing problems, then cost is reduced, but processing reliability deteriorates
Solution Approach 1:
When abnormalities are detected in the laser beam scanning unit through inspection, the system adjusts processing parameters such as laser power, scanning speed, or pulse duration to compensate for the detected issues. This allows continued use of the existing scanning unit at reduced cost while maintaining adequate processing reliability through parameter optimization
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively prevents insufficient breaking of the buffer layer by detecting and addressing abnormalities in the laser beam scanning unit, thereby reducing the need for costly replacements and ensuring consistent processing performance.
Implementation Method 1
a laser processing step of applying laser processing to a predetermined area of an inspection substrate by scanning the predetermined area with a pulsed laser beam
Implementation Method 2
an imaging step of imaging a plurality of processing marks formed in the predetermined area
Data Source
AI summary
An inspection method for a laser processing apparatus includes a laser processing step of applying laser processing to a predetermined area of an inspection substrate by scanning the predetermined area with a pulsed laser beam by use of a laser beam scanning unit of the laser processing apparatus while causing a holding table of the laser processing apparatus to stand still in a state in which the inspection substrate is held by the holding table, an imaging step of imaging a plurality of processing marks formed in the predetermined area, after the laser processing step, and a determination step of determining whether or not there is any abnormality in the laser beam scanning unit, based on the image obtained in the imaging step.