Laser Sealing of Membrane Vent Holes With Controlled Surface Asperity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing pulse laser irradiation techniques for sealing vent holes in inertial measurement units (IMUs) face challenges in controlling surface asperity, leading to rough edges on the seal zone, which can damage the device quality due to complicated process physics like Marangoni flow and silicon phase changes during the sealing of silicon membranes.
Innovation Solution
A method involving a continuous laser pulse with defined primary and secondary pulse regions, where the secondary laser pulse has lower power and a specific duration ratio, is applied to control the surface asperity by optimizing the laser intensity spatial distribution and solidification path, using computational fluid dynamics (CFD) models to simulate and reduce surface asperity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pulse laser irradiation technique is used to seal the vent hole, then the seal zone is formed, but surface asperity forms rough edges on the seal zone
Solution Approach 1:
The laser pulse is divided into multiple distinct pulses with different characteristics. The first laser pulse has a first set of characteristics (e.g., higher power, longer duration) to melt and seal the vent hole, while the second laser pulse has a second set of characteristics (e.g., lower power, shorter duration) to smooth the surface asperity. This segmentation of the sealing process into distinct phases resolves the contradiction by addressing both seal formation and surface quality with specialized pulses.
Solution Approach 2:
The method employs periodic laser pulsing with specific timing and characteristic variations. The sequential application of the first laser pulse followed by the second laser pulse creates a periodic action pattern that first forms the seal and then refines the surface. This periodic approach with controlled intervals allows the material to respond differently to each pulse, achieving both sealing and surface smoothness.
2Reliability
If laser irradiation is applied to seal the vent hole, then the seal zone is formed, but complicated process physics like Marangoni flow and silicon phase changes affect seal quality
Solution Approach 1:
The complex sealing process is segmented into distinct laser pulse phases, each targeting specific physical phenomena. The first pulse addresses melting and initial sealing while the second pulse addresses surface smoothing. This segmentation simplifies the control of complicated physics by breaking down the continuous complex process into manageable discrete steps with controlled parameters.
Solution Approach 2:
The method employs systematic parameter changes between laser pulses, including power, duration, and timing characteristics. By carefully controlling these parameters, the complex Marangoni flow and phase changes are managed in a predictable manner. The first pulse parameters are optimized for sealing while the second pulse parameters are optimized for surface quality, resolving the complexity through parameter optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces surface asperity by up to 90%, improving the seal quality and preventing damage to IMU devices by carefully managing the laser pulse characteristics and solidification process.
Implementation Method 1
applying a laser pulse having a laser intensity spatial distribution to the membrane vent hole to form a seal
Implementation Method 2
During the laser irradiation process, the seal zone quality can be significantly affected by complicated process physics, such as Marangoni flow and/or silicon phase changes
Implementation Method 3
silicon phase changes
Implementation Method 4
Marangoni flow and/or silicon phase changes
Data Source
AI summary
A method for controlling surface asperity during laser sealing of a membrane vent hole. The method includes applying a laser pulse having a laser intensity spatial distribution to the membrane vent hole to form a seal over the membrane vent hole. The seal has a seal surface. The laser pulse includes a primary laser pulse region and a secondary laser pulse region beginning once the primary laser pulse region ends. The primary laser pulse region has a primary laser power, and the secondary laser pulse region has a secondary laser power. The secondary laser power is less than the primary laser power. The seal surface has a controlled surface asperity characteristic.


