Laser Stage Discharge Structure for Anti-Clogging Debris Suction
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Solution Overview
Problem
Conventional laser apparatuses face clogging issues due to small pipe diameters during the dicing process, leading to inadequate suction performance and increased contamination.
Innovation Solution
A laser apparatus with a stage and discharge unit featuring a coupling unit and suction portion with a diameter of 100 mm or more, including a hollow casing, suction portion, and connection pipe, along with an inclined air supply pipe and nozzles to enhance airflow and foreign matter removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If small diameter pipes (8 mm or less) are used in the discharge unit, then the device complexity is reduced, but the pipes become clogged frequently and suction performance deteriorates
Solution Approach 1:
The patent changes the critical parameter of pipe diameter from 8 mm or less to 100 mm or more. This parameter change fundamentally resolves the clogging issue while maintaining structural simplicity through the hollow casing design that integrates the discharge function.
Solution Approach 2:
The patent transitions from a conventional bundle of small pipes to a single large-diameter hollow casing structure. This dimensional change in the discharge unit's cross-sectional area eliminates clogging problems while reducing structural complexity by replacing multiple small pipes with one integrated hollow structure.
2Ease of manufacture
If small diameter pipes are used in the discharge unit, then the ease of manufacture is improved, but the suction performance deteriorates
Solution Approach 1:
The patent changes the pipe diameter parameter to 100 mm or more, which dramatically improves suction performance and foreign matter removal efficiency. The hollow casing structure with this enlarged dimension maintains ease of manufacture through simple fabrication processes while achieving superior productivity.
3Device complexity
If the discharge unit uses a bundle of small pipes, then the device complexity is reduced, but the foreign matter discharge capability deteriorates
Solution Approach 1:
The patent changes the discharge unit's internal diameter from 8 mm or less to 100 mm or more, fundamentally improving foreign matter discharge capability. The hollow casing structure with this enlarged parameter prevents foreign matter accumulation while maintaining structural simplicity.
Solution Approach 2:
The patent increases the cross-sectional area of the discharge unit by using a large-diameter hollow casing instead of small pipes. This dimensional change enables effective discharge of foreign matter including fumes while keeping the structure simple and integrated.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The larger cross-sectional area of the discharge unit significantly reduces pipe clogging and enhances suction performance, effectively removing foreign matter and reducing contamination within the apparatus.
Implementation Method 1
a suction portion disposed on the casing
Implementation Method 2
a vacuum portion configured to provide suction through each of the fastening holes
Implementation Method 3
a laser generator configured to emit a laser beam onto a target substrate mounted on the stage
Data Source
AI summary
A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.