Lateral Bulk Acoustic Resonator Structure for Narrowband RF Filtering

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Solution Overview

Problem

Existing RF components face challenges in miniaturization and high performance at higher frequencies due to excessive loss and impractical expense, particularly in filtering functions required for cognitive radios, which are difficult to achieve with large and unwieldy components.

Innovation Solution

A lateral over-moded bulk acoustic resonator assembly is implemented, where the resonator structure vibrates in a plane parallel to the substrate, allowing for high quality factor and low impedance, enabling the fabrication of multiple resonators with varying properties on a single substrate, reducing energy dissipation and achieving a quality factor in excess of ten thousand.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If traditional filtering components are used at higher frequencies, then filtering function is provided, but the component size becomes large and unwieldy

Engineering Contradiction:
Improvesignal lossVSAvoidcomponent size
Core Design Contradiction:
Loss of energyVSVolume of moving object

Solution Approach 1:

The patent replaces traditional mechanical/electrical filtering components with acoustic resonators that use piezoelectric materials to convert electrical signals to acoustic waves and back. This substitution enables miniaturization while maintaining filtering functionality at higher frequencies, directly addressing the contradiction between component size and energy loss.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention transitions from planar two-dimensional resonator structures to three-dimensional bulk acoustic resonators with vertical cavity structures. This dimensional change allows for compact footprints while achieving high quality factors and narrow bandwidths, resolving the contradiction between small size and low energy loss.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If high performance spectrum analysis is provided at higher frequencies, then filtering capability is improved, but the components become large and complex

Engineering Contradiction:
Improvefiltering performanceVSAvoidcomponent complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the filtering function into multiple resonator elements with different resonant frequencies, each handling specific frequency bands. This segmentation allows complex spectrum analysis to be achieved through simple, modular resonator units, reducing overall device complexity while maintaining high performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The bulk acoustic resonator structure serves multiple functions: it acts as a filter, a frequency selector, and a signal transducer simultaneously. This multi-functionality eliminates the need for separate components, reducing device complexity while providing high performance spectrum analysis capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If multiple resonators with varying properties are fabricated on a single substrate, then integration density is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveintegration densityVSAvoidfabrication precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent achieves different resonant frequencies and properties by varying geometric parameters (length, width, cavity depth) of the resonators rather than changing materials or structures. This parameter-based differentiation allows multiple resonators with varying properties to be fabricated on a single substrate using standard lithographic processes, maintaining manufacturing precision while achieving high integration density.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables the creation of compact, high-quality factor filters with narrow bandwidth, suitable for large-scale integration and cognitive radio systems, allowing for efficient spectrum analysis and utilization of underutilized frequency bands without significant signal loss.

Implementation Method 1

The resonator structure comprises a piezoelectric transduction film

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

A lateral over-moded bulk acoustic resonator assembly is implemented, where the resonator structure vibrates in a plane parallel to the substrate, allowing for high quality factor and low impedance

Methodology Applied
Scientific EffectAcoustic resonance: Resonance

Data Source

PatentEP2436049B1Lateral over-moded bulk acoustic resonators
Publication Date: 2019.05.01 NORTHROP GRUMMAN SYSTEMS CORP
  • EP2436049B1 patent drawingFigure 1~2
  • EP2436049B1 patent drawingFigure 3~7
  • EP2436049B1 patent drawingFigure 4~5

AI summary

A bulk acoustic resonator assembly and methods for fabricated the resonator assembly is provided. The resonator includes a cavity on a first surface of a substrate, with a sheet of low acoustic loss material suspended over the cavity. The sheet of low acoustic loss material is configured such that an associated fundamental frequency of the sheet of low acoustic loss material is a function of a length of the sheet of low acoustic loss material in a direction parallel to the first surface of the substrate. A transducer includes an electromechanical layer on the sheet of low acoustic loss material and a patterned conductive material formed on the electromechanical material. The transducer is configured to induce vibrations in the low acoustic loss material upon application of an electrical signal to the conductive pattern.