Electrode recesses reflect transverse acoustic waves back into the resonance region, cutting energy leakage and raising Q factor without parasitic peaks.
An interdigital top-electrode frame reflects transverse Rayleigh-Lamb waves to cut energy leakage and raise anti-resonant quality factor.
Frequency-swept discontinuity detection in a nonlinear MEMS resonator improves sensing accuracy and noise robustness for physical quantity measurement.
A ring-connected BAW resonator uses shared reverse-parallel assemblies to deepen second harmonic suppression without increasing device area.
Multiple diaphragm thicknesses and dielectric layers separate shunt and series resonances, enabling RF filters above 3 GHz with wider bandwidths.
Optimized IDT-to-piezoelectric thickness and mark-to-pitch ratios suppress A3-mode spurs while lowering RF filter loss.
An intermediate-pitch shared reflector lets adjacent resonators share space while preserving stop-band and frequency characteristics.
Varying IDT finger pitches in parallel resonators keeps impedance inductive, preserving attenuation and sharpening multiplexer transition bands.
Stacked piezoelectric BAW resonators excite overtone modes to reach 5-20 GHz while preserving RF filter power handling for 5G NR.
Alternating piezoelectric film polarities raise BAW resonant frequency without thinner films or transition electrodes, reducing loss and improving Q.
Opposed weight and weight-film mass placement balances the vibrating arm to suppress thickness-direction noise and vibration leakage.
A large-area interconnection region replaces through-hole metallization to stabilize reverse parallel BAW resonator links and cut connection loss.
A serpentine connection isolates the resonant crystal from package shock and vibration, helping stabilize resonant frequency.
Low-dose beta intensity is determined from impedance-derived resonance frequency and Q factor, enabling compact and cost-efficient detection.
A ground electrode layer overlapped with RF components improves shielding, cuts signal radiation, and stabilizes ground potential.
Equivalent-circuit modeling extracts grounding pad and bond-wire parasitics to improve FBAR out-band suppression and assembly efficiency.
By placing the temperature sensor near the recess upper end, this case reduces external heat influence and improves piezoelectric temperature accuracy.
Optimized IDT thickness and mark-to-pitch ratios help XBAR resonators suppress spurious modes while supporting RF filtering above 3 GHz.
A CuAl2 alloy layer added to an Al IDT electrode boosts electric power resistance in acoustic wave filters while keeping fabrication practical.
Alternating piezoelectric layer polarizations help BAW resonators sustain high coupling and quality factor above 6 GHz.
Two crystal substrates use intermetallic bonding and side-surface routing to replace ceramic bases while improving airtight electrical connections.
A nested SAW package with via holes and a protruding pillar bump cuts parasitic capacitance, improves heat dissipation, and keeps size compact.
An integrated mass addition film over IDT electrodes suppresses transverse modes and spurious while lowering insertion loss and alignment burden.
A single acoustic resonator switches between series and parallel paths to cover multiple bands while cutting filter size and cost.
Alternating piezoelectric and negative-piezoelectric layers keep BAW harmonic-mode coupling high above 6 GHz, enabling wider, lower-loss filters.
Placing an acoustic mirror between the active resonator and circuit layers improves isolation and shielding while enabling smaller RF filters.
Intervening layers with tuned acoustic velocity trap and reflect elastic waves in SAW substrates, cutting passband loss, ripple, and polarization disturbance.
Region-specific piezoelectric thickness and sloped transitions let one SAW die support multiple bands while preserving k2, TCF, and low loss.
Non-parallel electrode edges disrupt cleavage paths in single-crystal piezoelectric membranes, reducing cracking while allowing thicker films.
Ion implantation forms a substrate trap layer that confines SAW energy, preserving quality factor without adding complex multilayer fabrication.
Discrete protruding mounts and insulating bonds cut heat transfer from the package to stabilize resonator frequency under external temperature changes.
A meandered superconducting transmission line and ground plane enable broadband, directional, tunable SAW conversion with near-zero loss.
Swirling surface acoustic waves create low-pressure traps for selective object handling without contact, heating, or nearby electrodes.
Separating signal and ground terminals onto opposite surfaces shrinks RF module footprint while preserving acoustic wave signal routing.
Replacing amorphous oxide sacrificial layers with a smooth-groove semiconductor structure improves crystal matching and FBAR layer quality.
A lead-out electrode routed through the piezoelectric body simplifies resonator interconnection, improving impedance ratio and pass-band loss.
A sacrificial oxide and selective metallization process improves piezoelectric resonator uniformity, conductivity, and thermal stability.
A series SAW resonator added to a BAW transmit filter suppresses second-order distortion, improves antenna matching, and stabilizes noise.
UV-cured adhesive bonding strengthens donor substrates for piezoelectric layer transfer while reducing curvature, cost, and thermal deformation.
A recessed external terminal lowers package height and lets joining material fill the gap, improving vibration and impact resistance.
Laser-induced substrate modification forms an FBAR cavity without sacrificial layers, simplifying air-gap fabrication and preserving crystal quality.
A second IDT tuned to interference frequencies suppresses IMD in acoustic wave multiplexers and helps protect receive sensitivity.
A parallel resonator tied only to the reception ground pad improves Tx-Rx isolation in a smaller acoustic wave filter without extra circuits.
Openings and separated border, connection, and resonant areas limit vibration transfer through the package and keep oscillator frequency stable.
A depolarized piezoelectric boundary in an FBAR suppresses transverse-wave loss and parasitic oscillation, improving Q factor with simpler fabrication.
Air-edge etching reflects horizontal acoustic waves in a BAWR, improving coupling, Q-factor, and bandwidth for RF filters and duplexers.
A layered piezoelectric stack confines boundary acoustic waves at an interface, cutting resonator thickness, radiation loss, and temperature drift.
Using different reflector pitches on opposite sides of the IDT suppresses conductance ripples and acoustic leakage in RF resonators.
Separated straight partition supports keep the cover layer uniform, improving mold resistance and lamination reliability in SAW packaging.
Capped cavities with wall or floor supports suspend MEMS components above the substrate, improving isolation and dense electronic integration.
A bridge structure over the acoustic reflector reflects and converts lateral modes, improving BAW resonator Q-factor in compact GHz designs.
A two-step pulsed DC reactive sputtering approach lowers defects and stress in additive-containing AlN films for BAW filters.
Two series multimode filters with partially overlapping passbands narrow acoustic filter bandwidth without increasing IDT pairs or chip size.
By placing the inductance component outside the piezoelectric substrate, this duplexer improves isolation while enabling a smaller filter layout.
Holding arms bend with the base to disperse moment, suppress resonant frequency shift, and reduce waveform distortion at larger amplitudes.
A stepped piezoelectric film with a peripheral insertion layer improves Q-value, suppresses spurious, and sharpens filter skirts in wireless resonators.
Segmented resonance regions and an insertion film cut parasitic capacitance, secondary distortion, and film cracking in acoustic resonators.
An insulating film overlapping an air-gap acoustic wave element adds a heat path that lowers substrate temperature without sacrificing compact mounting.
Non-uniform slanted IDT fingers near the common terminal suppress quadplexer pass-band ripple while preserving low-loss filter behavior.
A resin reinforcing portion at support-layer corners distributes dicing stress to prevent substrate cracks and cover peeling.
Orthogonal resonator and capacitor wave paths stabilize capacitance and improve passband edge steepness and out-of-band attenuation.
Alternating ALD-grown hermetic layers improve acoustic wave package sealing, blocking moisture ingress without excessive sealing thickness.
A phononic crystal acoustic mirror confines bulk acoustic waves to cut energy leakage, raise Q factor, and improve clock signal quality.
A reusable drive unit and disposable reservoir combine spring cannula insertion and programmable basal-bolus dosing for Parkinson's infusion.
Single crystal acoustic resonators improve thermal conduction, cut signal loss, and raise out-of-band rejection in high-power wireless base station filters.
Wafer-level copper pillar bump pads replace wirebond packaging in BAW devices, cutting RF circuit area while improving connection reliability.
Auxiliary wire electrodes and a sloped inorganic interlayer help bridged elastic wave wiring resist thermal-stress cracks and breakage.
Intentional coupling between wiring and bonding lines tunes BAW filter bands while cutting inductor size, area, and manufacturing cost.
By tuning Sezawa wave velocity in a LiNbO3 elastic wave resonator, this filter structure cuts spurious responses in carrier aggregation.
Serial arm resonators placed nearest the switch suppress leakage between overlapping acoustic wave filters and preserve attenuation.
Partially overlapping inductors on separate wiring layers shrink inductor area and improve impedance matching while reducing insertion loss.
A composite spring connection shifts resonant frequencies to suppress in-phase vibration and preserve anti-phase motion in gyrosensor structures.
Optimized LiNbO3 cut angle and substrate thickness raise SH-wave coupling coefficient k2 and expand filter bandwidth in resonators.
A dual parallel-arm resonator layout cuts filter size while limiting pass-band loss and preserving sharp attenuation on the high-frequency side.
Coordinated resonator frequency spacing sharpens wideband filter skirts while preserving passband impedance for narrow adjacent bands.
Phononic crystal structures guide acoustic energy between resonators to enable impedance conversion with lower reflections and simpler filter fabrication.
A layered crystal package uses a same-substrate frame and damping material to shrink oscillator size while maintaining a stable Q value.
A sealed dual-cavity piezoelectric structure removes through holes that degrade RF filtering and pressure sensing performance.
Optical ring resonators sense MEMS tether vibration to boost accelerometer sensitivity and stability in a compact low-SWaP-C design.
A dual wafer-bonded cavity uses oxide and metal layers to hermetically hold low-pressure dipolar molecules while supporting stable RF frequency signals.
Impedance inverters and tunable series resonators let one RF filter cover multiple bands without shifting insertion loss or impedance.
Multiple electro-acoustic transducers expand acoustic frequency range, enabling one deflector to scan different laser wavelengths with high throughput.
Crystal orientation and LiTaO3/SiO2 layer tuning suppress higher-order modes in silicon elastic wave devices while improving Q factor.
Alternating IDT finger-width regions shift emphasis mode higher to suppress lateral-mode spurious and improve multiplexer attenuation.
Using variable capacitive elements with different inflection voltages, this case widens linear frequency tuning across wide temperature ranges.
Specific IDT thickness ranges on LiTaO3 enable SH0 plate-wave operation at 500 MHz and 1 GHz with lower electrode loss and easier fabrication.
A support layer preserves the cap-to-generator gap during epoxy sealing, reducing deformation and preventing contact in acoustic wave packaging.
Different IDT duty ratios on one piezoelectric substrate simplify simultaneous frequency tuning of SAW band-pass filters and reduce process complexity.
A dual dielectric stack uses oxide and non-oxide films to protect IDT electrodes from corrosion while stabilizing frequency drift.
A ground interconnection with a different acoustic velocity portion cancels unwanted modes and sharpens pass-band selectivity.
Elliptical mesa surfaces suppress contour and flexure modes in doubly rotated crystal resonators, reducing frequency shifts and impedance drift.
A frequency-offset AC drive stabilizes MEMS resonator amplitude despite Q-value variation while reducing capacitive coupling in sensor readout.
An isolated high-acoustic-impedance layer in an FBAR stack suppresses parasitic lateral modes, improving insertion loss, Q factor, and stability.
Placing the resistive film along the low-displacement line between holding portions cuts vibration-induced resistance noise and improves MEMS temperature sensing.
Selective insulation leaves the resonator frame exposed, cutting reflection loss and improving Q and frequency selectivity in BAW filters.
A metal lid and vacuum-insulated housing help a temperature-compensated oscillator maintain low wander under rapid temperature changes.
Segmented IDT finger pitches reduce the resonance-antiresonance gap in a SAW resonator, sharpening filter attenuation without added capacitors.
A recessed thermistor layout and terminal spacing improve airflow, reduce thermal lag, and stabilize quartz resonator frequency.
A curved MEMS hemispherical resonator with stem and levitation support enables low resonant frequency and high Q for whole-angle gyroscopes.
A carrier-wafer package forms a hermetic cavity around fragile piezoelectric MEMS substrates, improving handling, sealing, and RF integration.
By lowering anisotropy in the IDT gap region, this resonator reflects lateral waves, cuts spurious leakage, and raises Q-value.
A stepped thickness profile in an AT-cut quartz crystal blank lowers CI by confining main vibration energy and suppressing leakage and sub-vibrations.
Arm-tip mounting makes paired tuning-fork arms vibrate in opposite phase, shrinking resonator length while preserving quality factor and lowering power use.
A VCO with RC charging and DC-blocking capacitance keeps crystal excitation stable across temperature changes without recalibration.
Localized electrode protrusions lower edge-region wave velocity to suppress transverse modes, spurious responses, and insertion loss.
Multiple hardmask etching shapes the BAW lower electrode to avoid reverse slopes, maintain dielectric coverage, and prevent shorts.
Metal-film grating electrodes on Y-cut lithium tantalate slow SH waves to suppress bulk wave emission and improve resonator Q.
A flat resonator with reduced friction and magnetic clamping enables narrower security markers while preserving detection amplitude.
A shield electrode and insulating film block direct wave leakage to improve out-of-band attenuation and duplexer isolation.
Outward secured portions and side inclined surfaces let a smaller AT-cut crystal mount securely while limiting vibration leakage and property loss.
Two laterally coupled plate wave modes widen thin-film BAW filter bandwidth while easing fabrication tolerances and suppressing spurious resonances.
A stepped substrate geometry balances energy trapping and end damping to stabilize crystal impedance and improve CI and Q values.
A trapezoidal etching stop structure flattens the resonator surface to prevent cracks and abnormal crystal growth in BAW cavities.
Optimized pad-to-mesa spacing in a mesa AT-cut crystal element enables sub-1000 μm sizing while keeping crystal impedance below 100Ω.
A laterally vibrating bulk acoustic resonator uses a suspended low-loss sheet and piezoelectric transduction to deliver compact, high-Q narrowband RF filters.
A grounded reflector and parallel cancel line suppress out-of-band leakage and capacitive coupling in compact acoustic wave filters.
An edge-thickened dense film over the IDT overlap supports uniform frequency adjustment while reducing transverse-mode spurious.
Two DETF resonators and a compressive beam detect rapid temperature shifts on-chip, improving MEMS compensation without external sensors.
Electrode lands drain piezoelectric and pyroelectric charge from substrate edges to suppress polarization reversal and limit insertion loss.
A support substrate reinforces a thinner elastic wave filter substrate while integrating passive elements to cut RF module height and wiring complexity.