Piezoelectric Resonator Cavity Structure Without Through Holes
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Solution Overview
Problem
The manufacturing process of resonators, such as film bulk acoustic resonators, often results in through holes that negatively affect their performance, particularly in RF filtering and pressure sensing applications.
Innovation Solution
A resonator design featuring a composite member with a piezoelectric layer positioned between two cavities, sealed by sealers on either side, which extends from the cavity walls without through holes, ensuring the cavities are completely separated and sealed, thereby enhancing performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional manufacturing process is used, then resonator can be manufactured, but through holes are created that negatively affect performance
Solution Approach 1:
The resonator structure is segmented into multiple members (first dielectric member, composite member, second dielectric member) with distinct functions. The composite member specifically addresses the through hole issue by providing a continuous non-through-hole section, while other members handle dielectric and sealing functions, resolving the contradiction between manufacturability and performance.
Solution Approach 2:
The invention uses a composite member comprising multiple layers (first electrical conductor, piezoelectric layer, second electrical conductor, first electrical insulator) with different materials and functions. This composite structure eliminates through holes while maintaining electrical and mechanical properties, directly resolving the performance degradation caused by traditional through holes.
2Ease of manufacture
If through holes are present in the piezoelectric film, then manufacturing is simplified, but RF filtering and pressure sensing performance deteriorates
Solution Approach 1:
The manufacturing process is segmented into stages where the composite member is formed first with its continuous structure, then other components are added. This allows the resonator to be manufactured without through holes while maintaining ease of production through modular assembly of dielectric members and sealers.
Solution Approach 2:
The composite member acts as an intermediary element between the first and second dielectric members. It provides the necessary continuous structure without through holes, mediating between the manufacturing requirements and performance requirements by enabling a through-hole-free design that can still be manufactured using standard processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively eliminates the performance-degrading through holes, allowing for satisfactory operation of the resonator in RF filtering and pressure sensing applications.
Implementation Method 1
The composite member may include a piezoelectric layer and may be positioned between the first cavity and the second cavity
Data Source
AI summary
A resonator may include a first dielectric member, a second dielectric member, a composite member, a first sealer, and a second sealer. The first dielectric member may have a first cavity. The second dielectric member may have a second cavity. The composite member may include a piezoelectric layer and may be positioned between the first cavity and the second cavity. The first sealer may be positioned between two portions of the first dielectric member. The first cavity may be positioned between the first sealer and the composite member. The second sealer may be positioned between two portions of the second dielectric member. The second cavity may be positioned between the second sealer and the composite member.