Layered Deposition Mask for Display Adhesion and Precision
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Solution Overview
Problem
Existing deposition masks do not adequately support the manufacturing of high-resolution display panels, particularly for wearable devices like HMDs and AR glasses, and lack sufficient adhesion to the display panels.
Innovation Solution
A deposition mask design featuring a mask substrate with a cell area and peripheral area, including a mask membrane with pixel openings and protrusions, where different inorganic layers and mask shadows are stacked to enhance adhesion and support high-resolution display panel manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a conventional deposition mask is used, then the manufacturing process is simple, but the adhesion to the display panel is insufficient
Solution Approach 1:
The mask shadow is constructed using composite materials including silicon oxide and silicon nitride layers. These different materials provide both mechanical support and enhanced adhesion to the display panel, resolving the contradiction between simple structure and sufficient adhesion.
Solution Approach 2:
The mask shadow is divided into multiple functional layers (silicon oxide layer, silicon nitride layer) with distinct roles. The silicon oxide provides structural support while the silicon nitride enhances adhesion, allowing the complex structure to achieve improved adhesion through functional segmentation.
2Strength
If the mask shadow is made thicker to improve adhesion, then adhesion improves, but the deposition precision of pixel openings deteriorates
Solution Approach 1:
The mask shadow is segmented into multiple thin layers (silicon oxide layer and silicon nitride layer) rather than a single thick layer. This segmentation maintains deposition precision by keeping individual layers thin while achieving cumulative adhesion improvement through the stack.
Solution Approach 2:
Different materials with complementary properties are used in the mask shadow. The silicon oxide provides structural integrity for precise deposition, while the silicon nitride layer enhances adhesion, allowing both precision and adhesion to coexist.
3Manufacturing precision
If the mask shadow is made thinner to improve deposition precision, then deposition precision improves, but adhesion deteriorates
Solution Approach 1:
The mask shadow uses composite materials where silicon oxide provides the necessary structural thickness for precision while silicon nitride contributes adhesion properties. This composite approach allows thin overall structure with sufficient adhesion.
Solution Approach 2:
Instead of increasing thickness in one dimension, the solution adds functional layers in the vertical dimension. The multi-layer stack provides adhesion through cumulative interface bonding while maintaining lateral thinness for deposition precision.
4Strength
If multiple inorganic layers are stacked to improve adhesion, then adhesion improves, but device complexity increases
Solution Approach 1:
The mask shadow uses a composite structure of silicon oxide and silicon nitride layers. These materials are deposited using standard semiconductor fabrication processes, making the multi-layer composite structure achievable without excessive complexity.
Solution Approach 2:
The thickness and material composition of each layer are optimized as parameters to achieve the desired adhesion strength. By adjusting these parameters within standard fabrication capabilities, the multi-layer structure achieves improved adhesion without unmanageable complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The deposition mask provides improved adhesion to the display panel, enabling the production of high-resolution displays suitable for wearable devices by ensuring precise deposition of materials.
Implementation Method 1
deposition mask
Data Source
AI summary
A deposition mask includes a mask substrate including a cell area and a cell peripheral area; a mask membrane positioned in the cell area of the mask substrate and including a pixel opening and a mask shadow surrounding the pixel opening; a first upper inorganic layer positioned on the cell peripheral area of the mask substrate and including a first protrusion that protrudes more toward the cell area than a side surface of the mask substrate; and a second upper inorganic layer positioned on the first upper inorganic layer and including a second protrusion that protrudes more toward the cell area than the side surface of the mask substrate. The mask shadow includes a first mask shadow spaced apart from the first protrusion; and a second mask shadow spaced apart from the second protrusion.