LCD Array Substrate Reducing Mask Processes

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Solution Overview

Problem

The existing manufacturing process for array substrates in liquid crystal display (LCD) devices requires a large number of mask processes, leading to increased production costs, longer manufacturing time, and higher defect rates, which negatively impacts product yield.

Innovation Solution

A method is introduced to fabricate array substrates using a reduced number of mask processes, specifically forming semiconductor layers and electrodes through a streamlined process that reduces the overall number of steps from nine to seven, thereby simplifying the manufacturing process and improving efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a large number of mask processes are used in the manufacturing process, then the manufacturing precision can be maintained, but the productivity decreases and production costs increase

Engineering Contradiction:

Improvemanufacturing precisionVSAvoidproductivity

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent combines multiple mask processes into a reduced number of mask processes by optimizing the fabrication sequence and integrating steps where possible. Specifically, the method reduces the number of mask processes from nine to seven by merging certain doping and electrode formation steps, thereby maintaining manufacturing precision while improving productivity

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent employs multi-functional processing steps where single mask processes achieve multiple objectives. For example, certain mask patterns are designed to simultaneously define multiple structures or perform both protective and patterning functions, reducing the total number of mask processes required while maintaining the necessary manufacturing precision

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If a large number of mask processes are used in the manufacturing process, then the manufacturing precision can be maintained, but the manufacturing time increases

Engineering Contradiction:

Improvemanufacturing precisionVSAvoidmanufacturing time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent merges multiple sequential mask processes into fewer combined steps, reducing the total manufacturing time. By integrating doping steps and electrode formation into fewer mask processes (reducing from nine to seven), the patent maintains manufacturing precision while significantly reducing the time required for substrate fabrication

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent performs preliminary preparation of semiconductor layers and electrode materials before the final mask processes, allowing for more efficient execution of the reduced number of mask steps. This preliminary action ensures that when the mask processes are performed, the materials are ready for immediate processing, reducing overall manufacturing time while maintaining precision

Inventive Principle:

Principle #10Preliminary action

3Manufacturing precision

If a large number of mask processes are used in the manufacturing process, then the manufacturing precision can be maintained, but the defect rates increase

Engineering Contradiction:

Improvemanufacturing precisionVSAvoiddefect rates

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent reduces defect rates by merging multiple mask processes into fewer steps, thereby reducing the cumulative probability of defects. Each additional mask process introduces potential for alignment errors, contamination, and processing variations; by reducing from nine to seven mask processes while maintaining necessary patterning precision, the patent significantly lowers defect rates

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent converts the potential harm of reduced mask processes into a benefit by carefully designing the fabrication sequence to maintain precision where critical while eliminating non-critical steps. The optimized process maintains manufacturing precision for critical features while sacrificing non-critical patterning steps, thereby reducing overall defect rates without compromising product quality

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Data Source

PatentUS7642554B2Array substrate for liquid crystal display device

Publication Date: 2010.01.05 LG PHILIPS LCD CO LTD

AI summary

An array substrate for an LCD device and a method of fabricating the same are disclosed. The array substrate includes: a substrate defining a display area and a non-display area; an n-type driving TFT and a p-type driving TFT in the non-display area; a switching TFT in the display region; a storage capacitor in the display region, the storage capacitor including first to third storage layers sequentially layered with intervening insulating layers, wherein the first storage layer contacts a first semiconductor layer under the first storage layer; and a pixel electrode in the display region, the pixel electrode connected to the switching TFT.