Contact Hole Sidewall Slope Variation for LCD Pad Integrity
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Solution Overview
Problem
Conventional liquid crystal display devices face issues with contact errors and breakage of gate pad electrodes due to cracks formed during the photolithography process, leading to incomplete signal transmission and increased resistance, making it difficult to accurately check for gate line breakages.
Innovation Solution
The inner side walls of contact holes in the insulating film are designed with gentler slopes than the remaining walls, reducing the likelihood of crack formation and breakage of gate and data pad electrodes, ensuring stable signal transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional photolithography process is used to form contact holes, then manufacturing process is simple, but cracks form in pad electrodes causing breakage and signal transmission errors
Solution Approach 1:
The patent applies different slope characteristics to different inner side walls of contact holes. Specifically, at least one inner side wall has a gentler slope than the others, creating localized geometric variation that prevents crack formation in critical areas while maintaining overall structural integrity. This local quality differentiation resolves the contradiction by targeting crack prevention where needed without complicating the overall manufacturing process.
Solution Approach 2:
The patent introduces asymmetric slope configurations in contact hole inner side walls, where at least one wall has a different (gentler) slope than the others. This asymmetric design disrupts the uniform stress distribution that leads to crack formation, thereby improving pad electrode reliability while maintaining compatibility with conventional photolithography processes.
2Ease of manufacture
If contact holes with uniform inner side walls are used, then manufacturing is straightforward, but cracks form during photolithography causing electrode breakage
Solution Approach 1:
The patent modifies the local geometry of contact hole inner side walls by making at least one wall have a gentler slope than the others. This localized geometric modification prevents crack formation during photolithography while maintaining overall manufacturing simplicity, thus resolving the contradiction between ease of manufacture and electrode continuity precision.
Solution Approach 2:
The patent changes the geometric parameter (slope angle) of at least one inner side wall of contact holes. By adjusting this parameter to create a gentler slope in specific areas, the patent prevents crack formation and maintains electrode continuity without significantly complicating the manufacturing process.
3Device complexity
If standard contact hole structure is used, then device structure is simple, but signal transmission reliability deteriorates due to cracks and increased resistance
Solution Approach 1:
The patent introduces local geometric variation in contact hole inner side walls, where at least one wall has a gentler slope. This localized modification prevents crack formation and maintains signal transmission reliability without significantly increasing overall device structural complexity.
Solution Approach 2:
The patent employs asymmetric slope configurations in contact hole walls to prevent crack formation that would compromise signal transmission. This asymmetric design improves reliability while maintaining relatively simple device structure.
Data Source
AI summary
A liquid crystal display device and a method for manufacturing the same are disclosed which are capable of preventing occurrence of contact errors between pads of gate or data lines and pad electrodes. The liquid crystal display device includes a signal line and a signal line pad arranged in one direction, an insulating film formed on the signal line and the signal line pad, the insulating film including at least one contact hole, through which a predetermined portion of the signal line pad is exposed, and a pad electrode formed on the insulating film, and electrically connected with the signal line pad via the at least one contact hole. The insulating film includes inner side walls defining the at least one contact hole, and at least one of the inner side walls has a slope gentler than a slope of the remaining inner side walls.