LDMOS Substrate Current Blocking via Reverse-Biased Diode

Solution Overview

Problem

LDMOS transistor devices experience performance degradation due to unwanted electric current flowing into the substrate when operating in inductive load mode, affecting thermal and frequency stability.

Innovation Solution

Incorporating a diode, such as a Schottky diode, in a reverse series connection with the PN junction to block electric current flow into the substrate, using a metal-containing element like metal silicide, positioned between the diode and the substrate, and surrounded by the gate and body electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the drain electrode is used as a pickup region electrically connected to an inductive load, then the LDMOS device can be used in an inductive load mode, but a large electric current undesirably flows into the P-type substrate when a negative pulse is applied

Engineering Contradiction:
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

An N-type well is introduced as an intermediary element between the drain electrode and the P-type substrate. This N-type well forms a PN junction with the P-type substrate and creates a reverse-biased diode connection that blocks unwanted current flow into the substrate while allowing the drain to function in inductive load mode.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The unwanted current flow path into the P-type substrate is extracted and blocked by creating a separate N-type well region. The drain electrode is electrically connected to the N-type well rather than directly to the P-type substrate, separating the useful inductive load function from the harmful current leakage path.

Inventive Principle:
Principle #2Taking out (Extraction)

2Power

If the LDMOS device operates in inductive load mode without current blocking, then the device can handle power amplification, but thermal stability and frequency stability deteriorate due to current flowing into the substrate

Engineering Contradiction:
Core Design Contradiction:
PowerVSStability of the object's composition

Solution Approach 1:

The N-type well acts as a mediator that enables power amplification in inductive load mode while preventing thermal and frequency instability. By forming a reverse-biased diode with the P-type substrate, it blocks current flow that would cause thermal heating and frequency drift, thus maintaining stability while preserving power handling capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If no additional structure is added to block current, then the device structure remains simple, but the performance is adversely affected by current flowing into the substrate

Engineering Contradiction:
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

A single N-type well is introduced as a minimal intermediary structure to block unwanted current flow. This addition maintains relative structural simplicity while significantly improving device reliability and performance by preventing current leakage into the substrate during inductive load operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The device structure is segmented by introducing the N-type well as a separate functional region between the drain and substrate. This segmentation allows the drain to maintain its inductive load functionality while the N-type well independently handles the current blocking function, improving reliability without excessive complexity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents large electric currents from flowing into the substrate, ensuring proper operation and desirable performance of the semiconductor device by maintaining thermal and frequency stability.

Implementation Method 1

a diode component configured to form a diode together with (or in cooperation with) the second-type well. The diode may be electrically connected to the PN junction in a reverse (or reverse-bias) series connection

Methodology Applied
Scientific EffectDiode reverse bias blocking: Diode

Data Source

PatentUS10211106B2Semiconductor device, related manufacturing method, and related electronic device
Publication Date: 2019.02.19
  • US10211106B2 patent drawing
  • US10211106B2 patent drawing
  • US10211106B2 patent drawing

AI summary

A semiconductor device may include a first-type substrate. The semiconductor device may further include a second-type well configured to form a PN junction with the first-type substrate. The semiconductor device may further include a diode component configured to form a diode with the second-type well. The diode may be connected to the PN junction in a reverse series connection. The second-type may be N-type if the first-type is P-type, and wherein the second-type may be P-type if the first-type is N-type.