Leadframe Connecting Bar Ablation for Clean Die Singulation

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Solution Overview

Problem

The formation of filaments and flakes during the singulation step in semiconductor device manufacturing due to the accumulation of metallic material on connecting bars causes short circuits between neighboring leads, leading to device failure and rejection.

Innovation Solution

The method involves removing the metallic material accumulated on the connecting bars via laser ablation before the singulation step, specifically targeting the tie bars and extending beyond the width of the connecting bars to prevent filament formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If large connecting bars are used during plating to facilitate processing, then plating is improved, but filament formation during singulation causes short circuits

Engineering Contradiction:
Improveplating processVSAvoiddevice reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies preliminary action by performing laser ablation of the metallic layer on connecting bars before the singulation step. This removes excess metal accumulated during plating in advance, preventing filament formation during subsequent blade cutting. The metallic layer is selectively removed from connecting bars while preserving it on leadframe bottom surfaces, ensuring clean separation without short circuits.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If metallic layer is plated on connecting bars during plating step, then solderability is improved, but excess metal accumulation causes filament formation

Engineering Contradiction:
ImprovesolderabilityVSAvoidfilament formation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by selectively removing the metallic layer only from specific locations - the connecting bars - while preserving it on the leadframe bottom surfaces. This localized treatment maintains solderability where needed (on leadframe bottoms) while eliminating the harmful effect of excess metal on connecting bars that causes filament formation during singulation.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent extracts the harmful excess metallic material from the connecting bars using laser ablation before singulation. This removal action separates the useful metallic layer (needed for solderability on leadframe bottoms) from the harmful accumulation (on connecting bars that causes filaments), allowing the useful function to be preserved while eliminating the harmful effect.

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If blade singulation is performed on plated connecting bars, then device separation is achieved, but metal flakes bridge neighboring leads causing short circuits

Engineering Contradiction:
Improvesingulation processVSAvoidlead separation cleanliness
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent performs preliminary laser ablation to remove the metallic layer from connecting bars before the blade singulation step. This preliminary action prevents metal flakes from being generated during blade cutting, ensuring clean separation of neighboring leads without bridging or short circuits, while maintaining efficient productivity.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces the risk of short circuits by eliminating the metallic layer at critical points, ensuring the integrity of the singulated devices without compromising solderability.

Implementation Method 1

metallic material accumulated on the back/bottom surface of the connecting bars is removed via laser ablation

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentEP4447094B1A method of manufacturing semiconductor devices and corresponding semiconductor device
Publication Date: 2026.04.29 STMICROELECTRONICS INT NV
  • EP4447094B1 patent drawingFigure 1
  • EP4447094B1 patent drawingFigure 2
  • EP4447094B1 patent drawingFigure 3

AI summary

A plurality of semiconductor chips or dice are arranged onto a first surface of a common electrically conductive substrate (12). The common substrate (12) has a second surface opposite the first surface and comprises adjacent substrate portions (120) having mutually facing sides with elongate sacrificial connecting bars (CB) extending between adjacent mutually facing sides. A solderable metallic layer (e.g., tin) is grown on the second surface of the common electrically conductive substrate (12) so that the solderable metallic layer extends over the connecting bars (CB). The solderable metallic layer is removed (e.g. via laser ablation) from at least part of the length the sacrificial connecting bars (CB). The common electrically conductive substrate (12) with the plurality of semiconductor dice arranged onto the first surface is cut to provide singulated individual semiconductor devices. Cutting is along the length of the elongate sacrificial connecting bars (CB) having the solderable metallic layer at least partly removed. In that way, undesired formation of electrically conductive filaments or flakes bridging parts of the substrate intended to be mutually isolated is countered.