Leaker Devices in Capacitor Bottom Nodes for Charge Drainage
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Solution Overview
Problem
As memory devices are scaled to smaller dimensions, leakage within memory cells becomes increasingly difficult to control, leading to unreliable data storage and power wastage, necessitating the development of architectures that alleviate or prevent undesired leakage.
Innovation Solution
Incorporating leaker devices into capacitor configurations to couple bottom electrodes with conductive plates, allowing excess charge to drain while preventing shorting, thereby addressing charge buildup at cell bottom nodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If memory devices are scaled to smaller dimensions to increase storage density, then storage capacity increases, but leakage within memory cells becomes increasingly difficult to control
Solution Approach 1:
The memory cell is segmented by introducing a leaker device that divides the bottom node into two separate nodes (first bottom node and second bottom node). This segmentation allows independent control of charge at each node, enabling the leaker device to selectively remove excess charge from one node without affecting the other, thereby maintaining reliability during scaling.
Solution Approach 2:
The leaker device acts as an intermediary component between the capacitor bottom electrode and ground. It provides a controlled charge removal path that mediates the charge buildup problem, allowing excess charge to be drained while preventing complete discharge, thus maintaining the capacitor's ability to store data while eliminating leakage issues.
2Reliability
If leaker devices are incorporated to reduce charge buildup, then reliability improves, but device complexity increases
Solution Approach 1:
The leaker device is merged with the existing capacitor structure by forming it within the same trench or opening as the capacitor. The leaker device shares the same physical space and fabrication process steps as the capacitor, combining two functions (capacitance storage and charge leakage control) into a single integrated structure, thereby minimizing additional complexity.
Solution Approach 2:
The leaker device structure serves multiple functions: it acts as both a charge removal path and a structural component of the capacitor assembly. The same conductive material and geometric features that form the leaker device also contribute to the overall capacitor architecture, reducing the need for separate components and simplifying the overall device structure.
Data Source
AI summary
Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.