Lift Pin Assembly Alignment for Electrostatic Chuck Openings
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Solution Overview
Problem
Lift pins in plasma processing apparatuses can become misaligned with the electrostatic chuck, leading to friction, shear, and particle accumulation, which can result in breakage and contact with the chuck, causing operational issues.
Innovation Solution
A lift pin assembly with a pin housing and a pin height adjustment member that moves along an axis to adjust the lift pin's position within the electrostatic chuck's opening, along with a pin holder assembly to maintain alignment and a fastener to lock the pin at desired heights, preventing misalignment and contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the lift pin is made movable to lift the workpiece off the electrostatic chuck, then the workpiece can be lifted and lowered, but the lift pin can become misaligned with the electrostatic chuck opening, causing friction and shear
Solution Approach 1:
A pin housing is introduced as an intermediary component that guides the lift pin's movement. The pin housing defines an opening that is aligned with the electrostatic chuck opening, ensuring the lift pin remains properly aligned during its movement to lift and lower the workpiece, thereby preventing misalignment-induced friction and shear
Solution Approach 2:
The lift pin assembly is segmented into multiple components: the lift pin itself, the pin housing, and the electrostatic chuck. This segmentation allows each component to perform its specific function - the lift pin for movement, the pin housing for alignment guidance, and the electrostatic chuck for workpiece holding - while maintaining proper alignment through the housing structure
2Productivity
If the lift pin moves within the electrostatic chuck opening, then the workpiece can be manipulated, but particles can accumulate on the lift pin, leading to breakage and contact issues
Solution Approach 1:
The pin housing acts as an intermediary structure that contains the lift pin's movement path. By confining the lift pin within the pin housing opening that aligns with the electrostatic chuck opening, the design prevents particles from accumulating on the lift pin during workpiece manipulation, thereby reducing the risk of breakage and contact issues
Data Source
AI summary
A lift pin assembly for a lift pin of a plasma processing apparatus is provided. The lift pin assembly includes a pin housing defining an opening into which a lift pin extends. The pin housing is positioned such that the opening is aligned with an opening defined by an electrostatic chuck. The assembly includes a pin height adjustment member partially positioned within the opening defined by the pin housing. The pin height adjustment member is movable along an axis in a first direction and a second direction to move the lift pin into and out of the opening defined by the electrostatic chuck. The assembly includes a pin holder assembly at least partially positioned within an opening defined by the pin height adjustment member. The pin holder assembly is configured to hold the lift pin such that the lift pin is aligned with the opening defined by the electrostatic chuck.