Light-Emitting Element Rod Sizing for Wavelength Uniformity
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Solution Overview
Problem
Inorganic light emitting diodes manufactured on a wafer substrate face challenges due to variations in the composition of the fluorescent material, leading to deviations in emission wavelength across the substrate, affecting the uniformity of light emission.
Innovation Solution
A method involving the formation of nanopatterns with varying diameters on a semiconductor structure to control the diameter of element rods, ensuring that light emitting elements emit light of substantially the same wavelength band despite differences in composition, achieved by etching the semiconductor structure and separating the rods from the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If inorganic fluorescent material layer is grown on a wafer substrate, then manufacturing efficiency is improved, but emission wavelength uniformity deteriorates due to composition variation across the substrate
Solution Approach 1:
The patent applies local quality by forming nanopatterns with different diameters at different spatial locations on the wafer substrate. Specifically, nanopatterns closer to the center of the wafer have larger diameters while those at the edges have smaller diameters, compensating for the radial composition gradient of the fluorescent material to achieve uniform emission wavelengths across the substrate
Solution Approach 2:
The patent changes the diameter parameter of nanopatterns as a function of their position on the wafer substrate. By adjusting the nanopattern diameter according to the local fluorescent material composition (which varies radially from the wafer center), the emission wavelength can be compensated and uniformity can be achieved while maintaining high manufacturing efficiency
2Manufacturing precision
If nanopatterns with different diameters are formed to compensate composition variation, then emission wavelength uniformity is improved, but device complexity increases
Solution Approach 1:
The patent applies preliminary action by pre-calculating and pre-designing the nanopattern diameters before fabrication based on the known radial composition profile of the fluorescent material. The diameter distribution of nanopatterns is optimized in advance to compensate for the anticipated composition variation, allowing uniform emission wavelengths to be achieved without complex real-time adjustments during manufacturing
Data Source
AI summary
A method of manufacturing a light-emitting element comprises providing a semiconductor structure on a substrate, the semiconductor structure emitting light having different wavelength bands from each other, measuring the light having the different wavelength bands from each other and defining wavelength regions, forming nanopatterns spaced apart from each other on the semiconductor structure, the nanopatterns having different diameters from each other, and etching the semiconductor structure to form element rods.