Light Guide for Charged Particle Beam Detector

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Solution Overview

Problem

Current charged particle beam apparatuses face low light utilization efficiency due to the lack of a light guide design that effectively collects light from a large-area light emitting surface and directs it to a small-area light receiving surface, resulting in significant light leakage before reaching the detector.

Innovation Solution

A charged particle beam apparatus with a light guide featuring an incident surface, an emitting surface, and a reflecting surface that is inclined to reflect light from the incident surface towards the emitting surface, where the emitting surface is smaller than the incident surface, and a slope surface is included to enhance light collection and transmission efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the area of the charge detection element is increased to receive more second charged particles, then the light emitting area increases, but the light receiving element has limited space and must have a small light receiving area, causing light leakage and low light utilization efficiency

Engineering Contradiction:
Improvenumber of second charged particles receivedVSAvoidlight utilization efficiency
Core Design Contradiction:
Quantity of substanceVSLoss of energy

Solution Approach 1:

The light guide utilizes the third dimension (depth/thickness) to resolve the area mismatch. By designing a light guide with specific thickness and internal reflecting surfaces, light from the large-area scintillator can be guided through the depth dimension to concentrate onto the small-area photodiode, effectively transforming a 2D area problem into a 3D spatial routing solution

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The light guide acts as an intermediary component between the scintillator and photodiode. It receives light from the large scintillator area, processes it through internal reflection and guidance, and delivers it to the small photodiode area, mediating the mismatch between the two components' areas

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If a conventional light guide design is used, then the structure is simple, but light leaks from the light guide before reaching the photodiode, resulting in low light utilization efficiency

Engineering Contradiction:
Improvelight guide structureVSAvoidlight utilization efficiency
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The light guide is segmented into distinct functional surfaces: an incident surface for receiving light, internal reflecting surfaces for guiding light, and an emitting surface for delivering light to the photodiode. This segmentation allows each surface to be optimized for its specific function, improving overall light utilization efficiency

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different surfaces of the light guide have different optical properties optimized for their local function. The incident surface is optimized for light reception, the internal surfaces have reflective properties for light guidance, and the emitting surface is optimized for light delivery to the photodiode, with each local area having the quality needed for its specific role

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The described light guide configuration significantly improves light utilization efficiency by effectively guiding light from a large-area light emitting surface to a small-area light receiving surface, reducing light leakage and enhancing the ratio of light reaching the detector.

Implementation Method 1

a scintillator configured to emit light when the charged particle is incident

Methodology Applied
Scientific EffectScintillation: Scintillation

Implementation Method 2

a light receiving element configured to convert the light into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

a reflecting surface that faces the incident surface and is inclined with respect to the incident surface so that the light incident from the incident surface is reflected toward a direction of the emitting surface

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11694873B2Charged particle beam apparatus
Publication Date: 2023.07.04 HITACHI HIGH TECH CORP
  • US11694873B2 patent drawing
  • US11694873B2 patent drawing
  • US11694873B2 patent drawing

AI summary

A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.