Light Source Apparatus Nozzle Positioning for Metal Base Cooling
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Solution Overview
Problem
The existing light source apparatuses in exposure systems face challenges in stabilizing lamp emission due to excessive cooling of the metal bases, which can lead to lighting failures, as they require sufficient gas flow to cool the metal bases effectively while avoiding excessive cooling of the light emitting substance.
Innovation Solution
A light source apparatus with a holder for the lamp, a condensing mirror to focus light, and nozzles with ejection holes to cool the metal bases, where the distance between the nozzle's center axis and the metal base's center axis is optimized between half and full of the cylindrical surface's radius to prevent direct cooling of the light emitting tube, using the Coanda effect to direct gas flow efficiently around the metal bases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a sufficient flow amount of gas is blown to the metal bases to cool them, then the cooling efficiency of the metal bases is improved, but the light emitting tube is excessively cooled and the light emitting substance cannot sufficiently be evaporated
Solution Approach 1:
The gas flow is directed to cool only the metal bases while avoiding the light emitting tube. The nozzle is positioned and oriented such that the gas jet targets the metal base surfaces that require cooling, while the light emitting tube remains in a different spatial zone that is not subjected to direct gas flow. This localized cooling approach allows the metal bases to be cooled effectively without preventing the light emitting substance from evaporating.
Solution Approach 2:
The cooling approach transitions from a general directional blow to a precisely positioned lateral blow. The nozzle is arranged to blow gas laterally toward the metal bases from a specific angular position, creating a three-dimensional cooling pattern that selectively cools the metal bases while leaving the light emitting tube in a different spatial dimension that is not affected by the gas flow.
2Stability of the object's composition
If the temperature of the metal bases is reduced to prevent overheating, then the thermal stability of the metal bases is improved, but the evaporation of light emitting substance is insufficient
Solution Approach 1:
The gas cooling system is configured to apply cooling selectively to the metal bases only. The nozzle positioning and orientation ensure that the cold gas jet contacts the metal base surfaces directly, while the light emitting tube operates in a separate thermal zone. This localized thermal management allows the metal bases to maintain thermal stability without interfering with the evaporation process of the light emitting substance.
Solution Approach 2:
The lamp structure is functionally segmented into distinct thermal zones: the metal bases that require active cooling and the light emitting tube that requires thermal isolation for proper operation. The nozzle system targets the metal base segment specifically, creating independent thermal control for each functional component. This segmentation allows the metal bases to be cooled without affecting the thermal conditions necessary for light emitting substance evaporation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for stable lamp emission by preventing excessive cooling of the light emitting tube, reducing the risk of lighting failures, and effectively managing the temperature of the metal bases and lead wires, thereby enhancing the operational stability and efficiency of the exposure apparatus.
Implementation Method 1
a nozzle including an ejection hole configured to eject a gas to cool the metal base
Implementation Method 2
using the Coanda effect to direct gas flow efficiently around the metal bases
Implementation Method 3
a condensing mirror configured to condense light generated by the lamp
Data Source
AI summary
A light source apparatus includes a holder configured to hold a lamp including a metal base having a cylindrical surface, a condensing mirror configured to condense light generated by the lamp, and a nozzle including an ejection hole configured to eject a gas to cool the metal base. A distance between a straight line including a center axis of the ejection hole and a center axis of the metal base ranges from not less than ½ of a radius of the cylindrical surface to not more than the radius.