Light Transmitting Member Screw Thread Detachable Design
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Solution Overview
Problem
In substrate polishing apparatuses, the wear of light transmitting members leads to errors in measurement by optical sensors, causing unnecessary replacement of polishing pads, which shortens the replacement cycle and increases costs, as the light transmitting member and polishing pad are strongly bonded and difficult to separate.
Innovation Solution
A light transmitting member with two bottom surfaces and a side surface featuring a screw thread, allowing for detachable attachment to the polishing pad, enabling independent replacement and extension of the polishing pad's replacement cycle without damaging the pad.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the light transmitting member is strongly bonded to the polishing pad during curing, then the bonding strength is improved, but the light transmitting member cannot be separated from the polishing pad without damage
Solution Approach 1:
The invention divides the light transmitting member into two distinct parts: a reusable base portion that remains permanently attached to the polishing pad, and a replaceable attachment portion that can be detached and replaced independently. This segmentation allows the bonding strength to be sufficient for operation while enabling easy replacement of the attachment portion when deteriorated, without damaging the base portion or polishing pad.
2Duration of action of stationary object
If the light transmitting member wears and surface damage occurs, then the durability is improved through continued use, but the light transmittance decreases causing measurement errors
Solution Approach 1:
The invention allows the attachment portion of the light transmitting member to be discarded when deteriorated and replaced with a new one, while the base portion is recovered and reused. This enables the polishing pad to continue being used throughout its full service life without measurement errors, as the attachment portion can be replaced whenever light transmittance deteriorates due to wear or surface damage.
3Measurement precision
If the light transmitting member is deteriorated before the polishing pad wears out, then the measurement accuracy is maintained by replacing the member, but the polishing pad replacement cycle is shortened and operational costs increase
Solution Approach 1:
By segmenting the light transmitting member into a reusable base portion and a replaceable attachment portion, the invention enables replacement of only the deteriorated attachment portion rather than the entire assembly. This maintains measurement accuracy by replacing the light-transmitting component when needed, while preserving the polishing pad and base portion for continued use, thus extending the overall replacement cycle and reducing operational costs.
4Measurement precision
If the entire polishing pad is replaced when the light transmitting member deteriorates, then the measurement accuracy is ensured, but the material waste increases and costs rise
Solution Approach 1:
The invention segments the light transmitting member into a reusable base portion integrated with the polishing pad and a separate replaceable attachment portion. When the attachment portion deteriorates, only this portion is replaced while the base portion and polishing pad continue to be used. This ensures measurement accuracy by replacing the deteriorated light-transmitting component while minimizing material waste by preserving the majority of the polishing pad structure.
Solution Approach 2:
The invention enables selective discarding of only the deteriorated attachment portion of the light transmitting member, while recovering and reusing the base portion and polishing pad. This approach ensures measurement accuracy by removing deteriorated components while minimizing material waste through recovery and continued use of the reusable portions.
Data Source
AI summary
Disclosed is a light transmitting member for a polishing pad. The light transmitting member has a cylindrical or truncated conical shape, and a screw thread is formed on a side portion thereof. A polishing pad includes such a light transmitting member and a substrate polishing apparatus includes such a polishing pad.