Link-Type Transfer Robot Compact Parallel Mechanism
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Solution Overview
Problem
Existing transfer robots for semiconductor manufacturing are not suitable for compact apparatus due to large occupied area and high power requirements, and sealing issues in non-atmospheric pressure chambers, making them inefficient for small-scale production and costly for medium to small-sized businesses.
Innovation Solution
A link-type transfer robot with a parallel link mechanism, using rotatable link members and pulleys to move the hand portion linearly, reducing the need for arm folding and allowing for easier sealing in vacuum chambers, with a compact design and lower power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a scalar-type transfer robot with arm folding operation is used, then horizontal movement is realized, but the occupied area becomes large
Solution Approach 1:
The patent replaces the traditional scalar-type arm folding mechanism with a parallel link mechanism consisting of multiple link members connected by rotation joints. This mechanical substitution eliminates the need for complex folding operations while achieving the same horizontal movement function with a more compact structure that occupies less space.
Solution Approach 2:
The patent employs dynamic link members that can rotate relative to each other through rotation joints, allowing the mechanism to adapt its configuration during operation. This dynamic structure enables compact storage position while maintaining full horizontal movement capability during operation, effectively reducing the occupied area.
2Length of moving object
If a linear shaft is used for vertical movement, then vertical movement is realized, but sealing of chamber wall becomes difficult
Solution Approach 1:
The patent replaces the linear shaft mechanism with a parallel link mechanism using rotation joints and link members for vertical movement. This substitution eliminates the need for linear shafts that penetrate chamber walls, thereby simplifying the sealing requirements and making chamber wall sealing much easier to implement.
Solution Approach 2:
The patent extracts the linear shaft component from the system and replaces it with an external drive mechanism that acts on the link members through rotation joints. This removal of the penetrating linear shaft eliminates the sealing complexity associated with maintaining vacuum or pressure differentials across chamber walls.
3Length of moving object
If a linear shaft is used to vertically move the entire arm mechanism, then vertical movement is achieved, but the power requirement becomes extremely large
Solution Approach 1:
The patent segments the arm mechanism into multiple independent link members (first link member, second link member, third link member) connected by rotation joints. Each link member can be driven independently with smaller motors, distributing the power requirement across multiple smaller actuators rather than requiring one extremely powerful linear shaft motor.
Solution Approach 2:
The patent uses dynamic rotation joints between link members that allow the mechanism to move through its range of motion with varying mechanical advantage. This dynamic configuration enables the use of smaller motors that can operate at higher speeds and lower torques throughout the motion cycle, significantly reducing the overall power requirement compared to a linear shaft system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The link-type transfer robot achieves horizontal and vertical movement without arm folding, simplifying the structure, reducing occupied space, and facilitating sealing in non-atmospheric environments, enabling cost-effective and efficient small-scale semiconductor production.
Implementation Method 1
by using power transmitted from a linking portion between the first link member and the support member
Implementation Method 2
one end portion rotatably linked to the support member and the other end portion rotatably linked to the transfer arm
Implementation Method 3
an arm driving portion for linearly moving the hand portion with respect to the transfer arm by using power transmitted from a linking portion
Implementation Method 4
a link driving portion to move the transfer arm by rotary driving the first or the second link member with respect to the support member
Data Source
AI summary
The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation.A transfer robot of the present invention includes a support member fixed to a side wall or the like, a transfer arm by which a hand member is held capable of linear movement, and first and second link members. One end portions of the first and second link members are rotatably linked to the support member, respectively. Another end portions of the first and second link members are rotatably linked to the transfer arm, respectively. The hand member holds/transfers a work. A rotational driving force applied to a linking portion between the support member and the first link member is transmitted to the transfer arm by a predetermined mechanism and linearly moves the hand member. The transfer arm moves by rotating the first link member or the second link member.