Linkable Semiconductor Processing Facility with Maglev Handling
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Solution Overview
Problem
Current semiconductor manufacturing equipment, such as cluster tools and linear systems, face limitations in space efficiency, flexibility, and reliability due to their architectural constraints, leading to issues like particle generation, deflection problems, and complexity in maintaining vacuum environments.
Innovation Solution
The development of a system with linkable or extensible semiconductor processing facilities that include mid-entry points for flexible configuration, air-based delivery systems, and robotic arms like SCARA arms for efficient material handling and processing in a vacuum environment, allowing for sequential or parallel processing of workpieces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If cluster tools are used to arrange processing modules radially about a central robotic arm, then material handling is achieved, but the system takes up a large amount of space and is limited to a small number of processing modules
Solution Approach 1:
The linear tool is divided into multiple independent processing modules arranged in a linear sequence, each module capable of being independently accessed by robotic arms. This segmentation allows for greater flexibility in the number of modules without requiring a compact radial arrangement, thus increasing adaptability while managing space efficiently through linear extension rather than radial clustering.
Solution Approach 2:
The system transitions from a two-dimensional radial arrangement (cluster tool) to a three-dimensional linear configuration with vertical stacking capabilities. Processing modules can be arranged linearly and potentially stacked vertically, utilizing the third dimension to increase the number of modules without proportionally increasing the floor space occupied.
2Productivity
If linear tools are used to increase flexibility and speed, then processing capability is improved, but the system generates unacceptable levels of particles due to friction among components
Solution Approach 1:
The patent replaces traditional mechanical rail and cart systems with magnetic levitation (Maglev) technology. The robotic arms are magnetically levitated above the processing modules, eliminating physical contact and friction between moving components. This substitution of mechanical support with magnetic fields maintains high-speed processing capability while eliminating the particle generation caused by mechanical friction and wear.
Solution Approach 2:
The system changes the fundamental operating parameter of material handling from mechanical contact-based movement to contactless magnetic field-based movement. By altering the physical state of interaction from solid-to-solid contact to magnetic field interaction, the system achieves frictionless operation that prevents particle generation while maintaining linear motion capabilities for high-speed processing.
3Speed
If rail-type linear systems are used with carts, then linear motion is achieved, but the system requires a large number of cars on rail to maintain throughput, complicating the system and reducing reliability
Solution Approach 1:
The patent extracts and eliminates the complex rail infrastructure and multiple cart system from the design. Instead of using a shared rail system requiring multiple carts to maintain throughput, the system uses independent magnetically levitated robotic arms that can independently access and service multiple processing modules. This removes the need for complex rail networks and multiple moving carts, simplifying the system while maintaining high-speed material transport capability.
Solution Approach 2:
The magnetically levitated robotic arms serve multiple functions: they can transport materials between any processing modules, perform processing operations, and independently control material flow. This multi-functionality replaces the specialized rail-cart system where carts were dedicated to specific transport tasks, reducing the number of components needed while maintaining or improving throughput capability.
4Length of moving object
If carts are mounted on rails with wheels, then linear motion is achieved, but particle problems occur due to wheel-rail contact friction
Solution Approach 1:
The patent replaces the wheel-rail mechanical contact system with magnetic levitation technology. Robotic arms are suspended and propelled through magnetic fields without physical contact to the rail structure. This substitution eliminates the friction and wear between wheels and rails that generate particles, allowing for long linear travel distances without particle contamination while maintaining precise positioning capability.
Data Source
AI summary
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.