Liquid-Cooling Coincidence Detector for Radiation False Count Mitigation

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Solution Overview

Problem

Inspection systems face false counts due to radiation-induced noise from sources like cosmic radiation and radioactive isotopes, which are not effectively mitigated by existing technologies despite advances in detector sensitivity.

Innovation Solution

A liquid-cooling coincidence detector system that includes a radiation-sensitive liquid generating light in response to incident radiation, photodetectors to measure this light, and controllers to identify and exclude coincidence events between illumination and radiation detection signals, thereby reducing false counts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If detector sensitivity is increased to improve inspection accuracy, then measurement precision is improved, but false count rate increases due to radiation detection

Engineering Contradiction:
Improveinspection accuracyVSAvoidfalse count rate
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

A liquid scintillator is introduced as an intermediary substance between the radiation source and the photodetector. The scintillator converts high-energy radiation particles into visible photons through scintillation, which are then detected by the photodetector. This intermediary transformation allows the system to detect radiation events with high sensitivity while maintaining the ability to distinguish them from sample signals through coincidence detection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system implements coincidence detection that provides feedback by comparing signals from multiple detectors simultaneously. When a radiation event is detected, the system checks for coincident signals across multiple photodetectors within a specific time window. This feedback mechanism allows the system to confirm radiation events and exclude them from sample analysis, resolving the contradiction between sensitivity and false counts.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If detector sensitivity is increased to detect weaker signals, then measurement precision is improved, but sensitivity to radiation noise increases

Engineering Contradiction:
Improvesignal detection capabilityVSAvoidradiation noise sensitivity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The system converts the harmful effect of radiation into a useful signal by using a liquid scintillator that transforms radiation particles into detectable photons. The radiation that would normally create noise is converted into a detectable optical signal that can be identified and excluded through coincidence detection, turning the harmful radiation sensitivity into a beneficial detection capability.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The liquid scintillator acts as an intermediary that transforms radiation particles into optical photons. This transformation allows the photodetector to sense radiation events through its optimized optical detection pathway, maintaining high sensitivity while enabling discrimination between radiation events and sample signals through the unique temporal and spatial characteristics of scintillation photons.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If radiation detection capability is enhanced to reduce false counts, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improvefalse count rejectionVSAvoiddetector system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The liquid scintillator serves multiple functions simultaneously: it acts as a radiation detection medium, a light guide to the photodetector, and a thermal management component. The photodetector array serves both to detect radiation events for false count rejection and to detect sample signals for inspection. This multi-functionality reduces overall system complexity while maintaining high reliability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system merges the radiation detection function with the sample inspection function by using the same photodetector array for both purposes. The coincidence detection logic combines signals from multiple detectors to identify radiation events, while the same detectors continue to monitor sample signals. This merging approach enhances false count rejection without requiring separate dedicated radiation detection hardware.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively mitigates radiation-induced false counts by accurately distinguishing between signals from the sample and those from external radiation sources, enhancing the sensitivity and accuracy of the inspection system.

Implementation Method 1

a liquid-cooling device for regulating a temperature of the illumination detector via a liquid circulating through one or more channels disposed on a second side of the illumination detector

Methodology Applied
Scientific EffectLiquid cooling: Heat Exchanger

Implementation Method 2

one or more photodetectors configured to detect photons generated in the liquid in response to particle radiation

Methodology Applied
Scientific EffectScintillation: Scintillation

Data Source

PatentUS10690599B1Radiation-induced false count mitigation and detector cooling
Publication Date: 2020.06.23 KLA CORP
  • US10690599B1 patent drawing
  • US10690599B1 patent drawing
  • US10690599B1 patent drawing

AI summary

An inspection system with radiation-induced false count mitigation includes an illumination source configured to illuminate a sample and a liquid-cooling coincidence detector, which includes an illumination detector to detect illumination from the sample, a liquid-cooling device for regulating a temperature of the illumination detector via a liquid, and photodetectors to detect light generated in the liquid in response to particle radiation. The liquid-cooling coincidence detector may also include controllers to identify a set of illumination detection events based on an illumination signal received from the illumination detector, identify a set of radiation detection events based on radiation signals received from the photodetectors, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and exclude the set of coincidence events from the set of illumination detection events to generate a set of identified features on the sample.