Liquid Jet X-Ray Source Geometry for Small Spot and High Flux

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Solution Overview

Problem

Existing liquid jet target X-ray sources face challenges in achieving a consistent and small X-ray spot size due to the thickness of the target jet being larger than the electron penetration depth, leading to excessive reabsorption and scattering of X-rays.

Innovation Solution

The use of a liquid jet target with an elongated, convex cross section, where the thickness in the propagation direction of the electron beam is smaller than the electron penetration depth, allowing for a smaller X-ray spot size and reduced reabsorption by optimizing the extraction angle and target geometry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the target jet thickness is increased to improve X-ray generation efficiency, then the X-ray flux increases, but the X-ray spot size increases and reabsorption increases

Engineering Contradiction:
ImproveX-ray fluxVSAvoidX-ray spot size
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent changes the geometric parameters of the liquid jet target, specifically making the thickness smaller than the electron penetration depth and creating an elongated cross-section with a flat impact surface. This parameter optimization allows the target to be thin enough to reduce reabsorption and spot size while still being thick enough to generate sufficient X-ray flux through the electron beam interaction.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the target jet thickness is increased to improve X-ray generation efficiency, then the X-ray flux increases, but the reabsorption of X-rays increases

Engineering Contradiction:
ImproveX-ray fluxVSAvoidX-ray reabsorption
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent optimizes the target thickness parameter to be smaller than the electron penetration depth, creating an optimal balance where the target is sufficiently thin to allow generated X-rays to escape without excessive reabsorption, yet sufficiently thick to convert electron beam energy into X-ray flux efficiently. This parameter optimization directly addresses the contradiction between maximizing X-ray output and minimizing energy loss through reabsorption.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration results in a smaller X-ray spot size and increased X-ray flux by minimizing reabsorption and scattering, while maintaining a consistent target thickness to ensure efficient X-ray generation and extraction.

Implementation Method 1

An electron beam is directed towards a liquid jet of target material, and X-ray radiation is generated upon impact of the electron beam upon the target

Methodology Applied
Scientific EffectBremsstrahlung:

Implementation Method 2

the X-ray absorption length, which is defined as the distance over which the X-ray flux, due to absorption in the target material, decreases by a factor 1/e

Methodology Applied
Scientific EffectPhotoelectric absorption: Absorption (EM radiation)

Implementation Method 3

the electron penetration depth, which is a measure indicating the maximum range an electron may penetrate a target upon impact

Methodology Applied
Scientific EffectElectron scattering: Scattering

Data Source

PatentEP4324009B1Liquid jet target x-ray source
Publication Date: 2025.04.23 EXCILLUM
  • EP4324009B1 patent drawingFigure 1a~1b
  • EP4324009B1 patent drawingFigure 2
  • EP4324009B1 patent drawingFigure 3

AI summary

An X-ray source is provided comprising a target generator configured to generate a liquid jet having an elongated cross section with a major axis and a minor axis; an electron source configured to generate an electron beam arranged to interact with the liquid jet in an interaction region to generate X-ray radiation; and an X-ray transparent window arranged to transmit X-ray radiation generated in the interaction region, wherein the X-ray transparent window is located for extraction of X-ray radiation at an angle α relative to the major axis; wherein the target generator is configured to generate the liquid jet such that said jet has a thickness at the interaction region, along a propagation direction of the electron beam, that is less than an electron penetration depth of the electron beam in the liquid jet. A corresponding method for generating X-ray radiation is also provided.