Liquid Mo(Arene)2 Precursors for Consistent Molybdenum Film Deposition
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Solution Overview
Problem
Existing molybdenum-containing film deposition technologies face challenges with inconsistent chemical delivery and reproducibility due to mixtures of molybdenum arene complexes with varying molecular weights and boiling points, leading to non-reproducible film deposition and high impurity levels.
Innovation Solution
Development of liquid mixtures of Mo(Ar1)(Ar2) compounds with increased ethylbenzene content and reduced undesirable ligands, ensuring consistent vapor pressure and stability, suitable for CVD and ALD applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If mixtures of molybdenum arene complexes with varying molecular weights and boiling points are used, then liquid phase delivery is achieved, but chemical delivery consistency and film deposition reproducibility deteriorate
Solution Approach 1:
The patent applies homogeneity by formulating liquid mixtures where all arene ligands have substantially the same or identical molecular weights (e.g., all C8, all C9, or all C10). This ensures uniform vapor pressure and consistent chemical delivery to the reaction chamber, eliminating the variability caused by mixed molecular weights while maintaining liquid phase delivery capability.
Solution Approach 2:
The patent changes the molecular weight parameter of the arene ligands to be uniform across all components in the mixture. By selecting arenes with identical carbon counts (e.g., all ethylbenzene derivatives with C8, all propylbenzene derivatives with C9), the vapor pressure and volatility parameters become consistent, enabling reliable and reproducible film deposition.
2Stability of the object's composition
If mixtures of molybdenum arene complexes with varying molecular weights are used, then liquid composition is achieved, but vapor pressure consistency deteriorates
Solution Approach 1:
The patent ensures homogeneity in the liquid composition by using arene ligands with uniform molecular weights. This creates consistent intermolecular forces and uniform vapor pressure across all components, allowing the mixture to maintain stable composition and consistent vapor pressure during delivery to the reaction chamber.
3Productivity
If conventional molybdenum precursors are used, then film deposition is achieved, but impurity levels increase
Solution Approach 1:
The patent changes the molecular structure parameters of the arene ligands to have identical carbon counts and similar structures. This uniformity reduces variability in decomposition behavior during film deposition, minimizing the formation of carbon-containing impurities and other decomposition byproducts, thereby improving film purity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a stable, liquid composition with consistent vapor pressure, facilitating uniform and reproducible deposition of high-purity molybdenum-containing films, reducing impurities and improving film quality.
Implementation Method 1
mixtures of Mo(Ar1)(Ar2) compounds that include about 60 mol % to about 95 mol % ethylbenzene ligand and reduced amounts of other ligands wherein the mixtures of compounds are liquid below 35° C. and have consistent vapor pressure
Implementation Method 2
The precursors react and/or decompose on the substrate surface creating a thin film of deposited material
Data Source
AI summary
The disclosed and claimed subject matter relates to mixtures of Mo(arene)2 compounds and uses thereof for deposition of Mo-containing films. The arene ligands are selected to provide mixtures of Mo(arene)2 compounds that are liquid at temperatures of about 20° C. and about 35° C. where there is little or no differences in boiling points between different components of the mixture.