Low Angle Membrane Frame Electroplating Cell

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Solution Overview

Problem

During extended high current electroplating, variations in plating chemical conductivity lead to non-uniform plating thickness across the substrate, with the center typically being thicker than the edges, necessitating costly chemical refreshing of the anolyte.

Innovation Solution

A membrane frame with surfaces extending inwardly and downwardly at a predetermined angle (greater than 0.5° and less than or equal to 3°) is used to maintain uniform anode chamber resistance and facilitate trapped air removal, thereby stabilizing plating thickness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If extended high current electroplating is performed, then productivity increases, but plating thickness uniformity deteriorates due to chemical conductivity variations

Engineering Contradiction:

Improveelectroplating rateVSAvoidplating thickness uniformity

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The membrane angle is changed from conventional high angles (greater than 5°) to a low angle (0.5° to 3°) to modify the flow dynamics and resistance distribution in the anode chamber, thereby maintaining uniform plating thickness during high current electroplating operations

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The membrane frame creates localized variations in flow resistance across the anode chamber, with the low-angle membrane providing specific resistance characteristics at different radial positions to compensate for conductivity variations and achieve uniform plating

Inventive Principle:

Principle #3Local quality

2Manufacturing precision

If the anolyte is periodically chemically refreshed to reduce conductivity variations, then plating thickness uniformity improves, but process cost increases

Engineering Contradiction:

Improveplating thickness uniformityVSAvoidprocess cost

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The low-angle membrane frame enables the system to self-regulate conductivity variations through passive flow management, eliminating the need for active chemical refreshing operations while maintaining uniform plating thickness

Inventive Principle:

Principle #25Self-service

3Object-generated harmful factors

If a conventional high angle membrane is used, then trapped air can be removed, but anode chamber resistance becomes non-uniform causing plating variations

Engineering Contradiction:

Improvetrapped air removalVSAvoidanode chamber resistance uniformity

Core Design Contradiction:

Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The membrane angle parameter is optimized to a low range (0.5° to 3°) that simultaneously enables trapped air removal while maintaining uniform anode chamber resistance distribution across the plating surface

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The membrane frame ensures uniform plating thickness across the substrate by maintaining consistent anode chamber resistance and effectively removing trapped air, reducing the need for costly chemical refreshing.

Implementation Method 1

The membrane includes a surface extending from a center of the cavity radially outward at an angle relative to a reference plane... The membrane is an ion permeable membrane separating a first electrolyte disposed on a first side of the membrane from a second electrolyte disposed on a second side of the membrane

Methodology Applied

Scientific EffectIon permeation: Permeation

Implementation Method 2

the membrane frame with surfaces extending inwardly and downwardly at a predetermined angle (greater than 0.5° and less than or equal to 3°) is used to maintain uniform anode chamber resistance and facilitate trapped air removal

Methodology Applied

Scientific EffectGravitational drainage: Gravitation

Implementation Method 3

Electroplating may be used to form current carrying lines during processing of semiconductors and/or packaging and multi-chip interconnection

Methodology Applied

Scientific EffectElectroplating: Electroplating

Implementation Method 4

During extended high current electroplating, plating chemical conductivity varies... The membrane is an ion permeable membrane separating a first electrolyte disposed on a first side of the membrane from a second electrolyte disposed on a second side of the membrane

Methodology Applied

Scientific EffectElectrochemical reaction: Electrolysis

Data Source

PatentUS12281402B2Low angle membrane frame for an electroplating cell

Publication Date: 2025.04.22 LAM RES CORP

AI summary

A cell to process a substrate includes at least one chamber wall, a membrane frame, and a membrane. The at least one chamber wall is arranged to form a cavity below a holder of the substrate. The membrane frame is disposed on the at least one chamber wall and across the cavity. The membrane is supported by the membrane frame and separating a first electrolyte from a second electrolyte. The membrane includes a surface extending from a center of the cavity radially outward at an angle relative to a reference plane, and wherein the angle is greater than or equal to 0° and less than or equal to 3°.