Machine Table with Antistatic Support Pins for TFT-LCD Handling
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Solution Overview
Problem
Existing machine tables for TFT-LCD panels cause electrostatic charges to accumulate during substrate handling, leading to potential broken circuits, short circuits, and substrate deformation due to friction and sudden electrostatic discharges, which can result in unrepairable damage.
Innovation Solution
A machine table with built-in support pins that have cavities for spraying antistatic liquid onto the substrate surface, combined with a pneumatically-controlled liquid supplying unit and electrostatic charge measuring and control systems to manage and eliminate electrostatic charges, ensuring even coating and preventing damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is moved onto or out from the machine table, then the substrate handling operation is completed, but electrostatic accumulation occurs on the body surface due to friction
Solution Approach 1:
The antistatic liquid is sprayed onto the body surface before substrate contact to prevent electrostatic accumulation from occurring in the first place, rather than treating it after the fact
Solution Approach 2:
The antistatic liquid acts as an intermediary substance between the substrate and the body surface, facilitating smooth contact while preventing electrostatic charge buildup through its conductive properties
2Ease of operation
If the support pin moves downward to separate from the substrate, then the substrate is released, but electrostatic breakthrough occurs causing signal line damage
Solution Approach 1:
The antistatic liquid is applied to the body surface before the support pin separation occurs, preparing the surface to prevent electrostatic breakthrough during the subsequent rapid separation movement
Solution Approach 2:
The conductive film formed by the antistatic liquid serves as a protective layer that cushions against electrostatic discharge during the sudden support pin retraction, preventing damage to signal lines
3Force
If electrostatic accumulation occurs on the body surface, then the substrate may be adsorbed, but substrate deformation and cracks occur when lifted
Solution Approach 1:
The antistatic liquid's conductive properties convert the potentially harmful electrostatic accumulation into a beneficial controlled adsorption force, allowing uniform substrate contact without creating localized stress points that would cause deformation or cracks
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively eliminates electrostatic charges, preventing broken circuits and substrate deformation, ensuring reliable handling and maintenance of TFT-LCD substrates by forming a conductive film and controlling the antistatic liquid application based on measured electrostatic parameters.
Implementation Method 1
electrostatic breakthrough occurs at the position where the signal lines overlap each other on the substrate 1 due to a sudden change in the surroundings, and parts of the signal lines may be broken or short-circuited due to the electrostatic discharge (ESD)
Implementation Method 2
each support pin including a built-in cavity from which an antistatic liquid is sprayed onto an upper surface of the body
Data Source
AI summary
The present disclosure provides a machine table for supporting a substrate. The machine table includes a body; pin holes each penetrating through the body in a thickness direction; and support pins each received in the pin hole and movable up and down in the thickness direction, each support pin including a built-in cavity from which an antistatic liquid is sprayed onto an upper surface of the body.