Machining Machine Bottom Working Disk Thermal Deformation Control
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Solution Overview
Problem
Machining machines face challenges in maintaining precise gap geometry due to heat-related deformations during the machining process, which affects the quality of machined workpieces, especially for high-precision items like prime wafers.
Innovation Solution
A double or one-side machining machine is configured to allow for local deformation of the bottom working disk, enabling it to assume a target geometry and compensate for heat-induced deviations in the working gap by adjusting its shape radially between the inner and outer edges, using hydraulic, pneumatic, or mechanical means to control the deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If temperature control channels with cooling water are used to counteract process heat, then temperature rise is reduced, but manufacturing precision of working disk geometry cannot be maintained due to thermal deformation
Solution Approach 1:
The working disk is pre-deformed during manufacturing to anticipate and compensate for the thermal deformation that will occur during operation. By pre-shaping the disk with opposite deformation characteristics, the thermal expansion and distortion are counteracted, maintaining precise gap geometry despite temperature changes.
Solution Approach 2:
The invention changes the geometric parameters of the working disk by introducing pre-calculated deformation patterns during manufacturing. These parameter changes include modifying the radius, thickness, or profile of the disk to predictively compensate for thermal effects, allowing the disk to maintain its functional geometry under operating temperature conditions.
2Shape
If mechanical deformation apparatus is used to change working surface geometry, then global deformation is achieved, but local deviations from ideal gap geometry caused by process heat cannot be fully compensated
Solution Approach 1:
The invention applies local quality by implementing deformation patterns in specific regions of the working disk rather than uniform global deformation. Different zones of the disk are pre-deformed according to the local thermal distortion patterns expected during operation, allowing precise compensation of gap geometry deviations in each specific area where they occur.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively maintains optimal machining results by adjusting the working gap geometry to accommodate process heat, improving precision and flexibility in machining large workpieces and optimizing parameters like rotary speed and load, thereby enhancing machining efficiency and reducing errors.
Implementation Method 1
using hydraulic, pneumatic, or mechanical means to control the deformation
Implementation Method 2
using hydraulic, pneumatic, or mechanical means to control the deformation
Implementation Method 3
a change in the working gap arises between the working disks due to the process heat which arises during machining. In particular, a heat-related deformation of the working disks occurs
Data Source
AI summary
A machining machine includes an annular bottom working disk and a top counter bearing element. The bottom working disk and top counter bearing element are driven to rotate relative to each other. A working gap is defined between the bottom working disk and the top counter bearing to machine flat work pieces on at least one side. A means for generating a local deformation of the bottom working disk are also provided.