Macrocell Support Structure for Epitaxial Chamber Thermal Management
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Solution Overview
Problem
Semiconductor processing chambers face challenges with temperature uniformity and thermal management, leading to reduced product yield due to inadequate thermal shielding and energy inefficiency, which results in excessive energy consumption and component degradation.
Innovation Solution
The introduction of a macrocell support structure with interconnecting physical supports made of metal, ceramic, or polymer materials, providing a high porosity and permeability range, which enhances thermal insulation and energy management by absorbing and redistributing electromagnetic energy, reducing thermal shock, and conserving energy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If traditional solid components are used in the processing chamber, then structural strength is maintained, but thermal insulation performance deteriorates leading to temperature non-uniformity
Solution Approach 1:
The patent applies porous materials with controlled porosity (30-90%) and specific pore size distributions (1-5000 microns) to create thermal insulation barriers within chamber components. These porous structures trap heat and reduce thermal conduction, thereby improving temperature uniformity while reducing energy loss through the chamber walls and components.
Solution Approach 2:
The patent employs composite materials combining different phases (solid matrix with porous voids, potentially filled with insulating gases or vacuum) to achieve optimized thermal management. The composite structure provides both mechanical strength from the solid framework and thermal insulation from the porous architecture, resolving the contradiction between structural integrity and thermal performance.
2Manufacturing precision
If quartz liners are used for thermal shielding, then some thermal protection is provided, but temperature control precision is insufficient for advanced semiconductor processing
Solution Approach 1:
The patent implements local quality by creating zones with different porosity levels and pore size distributions within specific chamber components based on their thermal management requirements. Critical areas requiring precise temperature control have optimized porous structures with specific characteristics, while other areas use different configurations, allowing precise temperature control without uniformly increasing overall system complexity.
3Reliability
If dense solid structures are used for chamber components, then mechanical strength is sufficient, but thermal shock resistance deteriorates causing component degradation
Solution Approach 1:
The patent utilizes porous materials whose interconnected pore structures (20-100% permeability) allow gradual heat penetration and distribution, reducing thermal gradients and thermal stress during rapid heating or cooling cycles. This porous architecture significantly improves thermal shock resistance while maintaining adequate mechanical strength through the solid framework.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves thermal insulation and energy efficiency, reducing energy consumption, extending component lifespan, and enhancing product yield by maintaining consistent temperature and reducing thermal stress within the epitaxial growth processing chamber.
Implementation Method 1
enhances thermal insulation and energy management by absorbing and redistributing electromagnetic energy
Implementation Method 2
enhances thermal insulation and energy management by absorbing and redistributing electromagnetic energy
Data Source
AI summary
An epitaxial growth processing chamber has a component that has a macrocell support structure. The macrocell support structure has interconnecting physical supports that define fluidly-connected pores. A component configured for use in an epitaxial growth processing chamber has a macrocell support structure with interconnecting physical supports defining fluidly-connected pores. The component may be one or more of a lower liner, an upper liner, a baseplate, an exhaust cap, an injection ring, and an injection cap. The interconnecting physical supports may comprise a material such as a metal, a ceramic or glass material, a polymeric material, and combinations thereof. The component may have a free-standing configuration, a plate-supported configuration, a sandwich configuration, a surface sealed configuration, and a solid polymer-filled configuration.