Magnet Bar Structure With Integrated Sensor For Tubular Target Monitoring
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Solution Overview
Problem
In sputtering deposition processes, there is a challenge in accurately determining the properties, quality, and identity of tubular targets, leading to potential substrate material waste and damage to the vacuum system due to the use of damaged or inappropriate targets.
Innovation Solution
A magnet bar structure with integrated sensing capabilities, including ultrasonic transducers, optical sensors, and RFID readers, that can monitor intrinsic and extrinsic properties of tubular targets during installation and operation, providing real-time quality and status information and preventing incorrect target usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional target storage and installation methods are used without sensing capabilities, then the installation process is simple and quick, but the risk of using damaged or wrong targets increases leading to substrate material waste and system damage
Solution Approach 1:
The target provides self-identification and self-monitoring capabilities through integrated sensors and RFID tags, automatically reporting its own status, location, and suitability for use without requiring external inspection systems
Solution Approach 2:
The sensing device provides real-time feedback about target conditions (damage, position, temperature) and RFID readers provide feedback about target identity, enabling the system to verify target suitability before and during the sputtering process
2Adaptability or versatility
If multiple different targets are stored and tracked for manufacturing, then production versatility is improved, but the complexity of target management and installation increases
Solution Approach 1:
Each target carries its own RFID tag with embedded identification information, automatically providing its identity and specifications to the system without requiring manual tracking or complex inventory management
Solution Approach 2:
The RFID tagging system provides a universal identification method that works across all target types and substrates, creating a standardized management approach that handles diverse targets through a single system
3Reliability
If target installation and verification processes are made more thorough to prevent damage and ensure quality, then target reliability improves, but the installation time and productivity decrease
Solution Approach 1:
Targets are pre-tagged with RFID identifiers and equipped with sensors before installation, allowing verification to occur automatically during the installation process rather than requiring separate inspection steps
Solution Approach 2:
Manual visual inspection and physical verification of targets are replaced by automatic RFID reading and sensor-based detection, dramatically reducing the time required for target verification while maintaining thorough quality checks
4Loss of information
If no sensing device is attached to the magnet bar, then the magnet bar structure remains simple and cost-effective, but the ability to monitor target properties and detect issues in real-time is lost
Solution Approach 1:
The sensing device is integrated with the magnet bar structure, merging the monitoring function with the existing magnetic field generation component to minimize additional complexity while maximizing information gathering capability
Solution Approach 2:
The sensing device acts as an intermediary between the target and the control system, collecting and transmitting target status information without requiring direct intervention or complex interaction with either the target or the control system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnet bar structure effectively identifies and monitors the properties of tubular targets, reducing substrate material waste and vacuum system damage by ensuring only suitable targets are used, and allowing for data logging and storage of target history.
Implementation Method 1
a sensing device, wherein the sensing device is attached to the magnet bar structure for sensing intrinsic and/or extrinsic properties of a tubular sputtering target
Implementation Method 2
an end-block is used for rotatably carrying a sputtering target, and wherein a magnet bar comprises a sensor for generating a sensor signal representative of a position or the magnetic field strength of a magnetic configuration
Data Source
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AI summary
A magnet bar structure (101) for a sputter magnetron system comprises a magnet bar (102) having attached to it a sensing device (110) for sensing intrinsic and/or extrinsic properties of a tubular sputtering target (200) when mounted over the magnet bar structure (101).