Magnetic CMP Retainer Ring for Fast Lower Ring Replacement
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Solution Overview
Problem
Retainer rings in chemical mechanical polishing (CMP) processes wear and get damaged, necessitating frequent replacement, which can prolong the process and increase costs due to the need to replace other components and potential damage to the polishing head.
Innovation Solution
A retainer ring design featuring a magnetic upper ring and a detachable lower ring with interlocking connectors, grooves for easy separation, and a magnet receptacle, allowing for quick and easy replacement of the lower ring without disturbing other components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the retainer ring is designed as a single integrated piece, then the structure is simple and strong, but it cannot be easily replaced and requires disturbing other components during replacement
Solution Approach 1:
The retainer ring is divided into an upper ring and a lower ring that can be separately attached and detached. The lower ring can be replaced independently without removing the upper ring, allowing easy replacement of worn components while maintaining the overall structural integrity of the retainer ring assembly
Solution Approach 2:
The retainer ring transitions from a static integrated structure to a dynamic modular structure where the lower ring can be easily attached and detached. This dynamic design allows the lower ring to be replaced quickly by simply detaching it from the upper ring, eliminating the need to disturb other components during replacement
2Reliability
If the retainer ring is frequently replaced, then worn components are renewed, but the process time increases and costs increase due to disturbing other components
Solution Approach 1:
By segmenting the retainer ring into replaceable upper and lower rings, the lower ring can be quickly swapped out when worn without affecting the upper ring or other components. This segmentation enables rapid replacement that reduces both process time and costs
Solution Approach 2:
The interlocking connectors are pre-designed into the upper and lower rings, allowing the lower ring to be quickly attached and detached without requiring complex assembly or disturbance of other components. This preliminary design of connection mechanisms speeds up the replacement process
3Reliability
If the retainer ring uses strong coupling to prevent wafer detachment, then the wafer is securely held, but the retainer ring becomes difficult to replace
Solution Approach 1:
The retainer ring is segmented into two parts with different functions: the upper ring provides strong coupling to secure the wafer, while the lower ring can be easily detached for replacement. This segmentation allows the system to simultaneously achieve strong wafer retention and easy maintenance
Solution Approach 2:
The coupling mechanism is made dynamic through the interlocking connectors that allow the lower ring to be easily attached and detached. This dynamic design enables the lower ring to be replaced quickly while the upper ring maintains strong coupling to secure the wafer during polishing operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates rapid and cost-effective replacement of worn retainer rings, reducing process time and minimizing damage to the polishing head, while maintaining stable coupling and alignment.
Implementation Method 1
an upper ring configured to be coupled to a polishing head of a polishing device and is formed of a magnetic material
Data Source
AI summary
Provided is a retainer ring including an upper ring configured to be coupled to a polishing head of a polishing device and is formed of a magnetic material, a lower ring configured to share a central axis with the upper ring, and to be attached to and detached from the upper ring, wherein the upper ring includes a plurality of first connectors, and a groove formed at an outermost radial edge of the upper ring, and the lower ring includes a plurality of second connectors that are formed at positions corresponding to the plurality of first connectors and interlocked with the plurality of first connectors, and a magnet receptacle formed on a surface facing the upper ring and configured to accommodate a magnet.