Magnetic Deposition Mask Structure for 3000 PPI OLED Patterning

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Solution Overview

Problem

The manufacturing of high-resolution display panels for head-mounted displays requires precise deposition masks to form organic light emitting layers, but existing deposition masks lack the necessary precision and adhesion to achieve the required resolution of 3000 Pixels per Inch (PPI) or more.

Innovation Solution

A deposition mask is designed with a magnetic layer on a membrane and a magnetic plate, enhancing adhesion between the mask and the backplane substrate, thereby improving deposition precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional deposition mask without magnetic layer is used, then the device complexity is low, but the deposition precision and adhesion are insufficient for 3000 PPI resolution requirements

Engineering Contradiction:
Improvedeposition precisionVSAvoidmask structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies composite materials by combining a magnetic layer with specific magnetic permeability (330 or less) and a magnetic plate with the membrane structure. This composite construction enhances adhesion between the mask and backplane substrate, enabling precise deposition at 3000 PPI resolution while maintaining structural integrity through the synergistic combination of different material properties.

Inventive Principle:
Principle #40Composite materials

2Strength

If the magnetic layer thickness is increased to improve adhesion, then the adhesion between mask and substrate improves, but the deposition precision may be compromised due to excessive thickness

Engineering Contradiction:
Improveadhesion strengthVSAvoiddeposition precision
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent optimizes the magnetic layer thickness to a specific range (50-100 nm) and controls the magnetic plate thickness to be thinner than the inorganic film layer or nitride layer. This parameter optimization ensures sufficient adhesion strength while maintaining deposition precision, balancing the competing requirements through careful control of layer dimensions and magnetic permeability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The deposition mask enhances the precision of organic light emitting layer deposition on the backplane substrate, ensuring high-resolution images can be achieved.

Implementation Method 1

a magnetic layer disposed to cover at least a portion of the membrane... enhancing adhesion between the mask and the backplane substrate

Methodology Applied
Scientific EffectMagnetic attraction: Magnetism

Data Source

PatentUS20260062789A1Deposition mask
Publication Date: 2026.03.05 SAMSUNG DISPLAY CO LTD
  • US20260062789A1 patent drawing
  • US20260062789A1 patent drawing
  • US20260062789A1 patent drawing

AI summary

A deposition mask includes a mask frame in which a cell opening is formed, a membrane disposed on top of the mask frame, and a magnetic layer disposed to cover at least a portion of the membrane.