Magnetic Levitation Deposition Apparatus for Large-Area OLED Mask Sagging
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Solution Overview
Problem
The existing deposition methods for organic light-emitting display apparatuses face limitations when manufacturing large-area devices, as fine metal masks sag due to their weight, leading to inaccurate pattern formation and increased manufacturing time, especially when aligning and separating large-area substrates from masks.
Innovation Solution
A deposition apparatus with a transfer unit and deposition unit that uses magnetic levitation to support and balance the moving unit, preventing sagging and enabling precise deposition by applying an attractive force without direct contact, and utilizing a patterning slit sheet to deposit materials accurately on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-area fine metal mask is used to manufacture large-area organic light-emitting display apparatus, then the deposition area is increased, but the mask sags due to its own self weight and thus it is not possible to form an intermediate layer in a preset accurate pattern
Solution Approach 1:
The patent replaces the mechanical contact-based fine metal mask system with a magnetic field-based deposition system. Instead of using a physical mask that sags under its own weight, the invention uses a magnetic field to control the deposition of intermediate layers, eliminating the mechanical support structure that causes sagging and maintaining pattern accuracy over large areas.
Solution Approach 2:
The invention changes the fundamental parameter of deposition control from mechanical contact (physical mask) to magnetic field interaction. By using magnetic fields to guide and control the deposition process, the system maintains precision without the gravitational sagging that plagues large-area physical masks.
2Productivity
If a large-area fine metal mask is used to simultaneously manufacture a plurality of organic light-emitting display apparatuses, then the productivity is increased, but it takes a substantial amount of time for aligning the large-area substrate with the large-area FMM and separating the substrate from the FMM
Solution Approach 1:
The patent eliminates the mechanical alignment and separation operations by replacing the physical mask system with a magnetic field-based deposition system. Without a physical mask to align and separate, these time-consuming steps are removed entirely, significantly reducing cycle time while maintaining the ability to manufacture multiple devices simultaneously.
Solution Approach 2:
The invention extracts and removes the fine metal mask component from the deposition system, eliminating the need for alignment and separation operations associated with physical masks. This extraction of the masking function to a magnetic field-based approach removes the time-consuming mechanical operations while preserving the deposition capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise and accurate deposition on large-area substrates, increasing manufacturing yield and speed by preventing sagging and reducing the need for direct contact between the mask and substrate, thus overcoming the limitations of traditional methods.
Implementation Method 1
The second support unit may be configured to apply attractive force by using a magnetic field to the moving unit
Data Source
AI summary
A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.