Magnetic Focus Ring Heat Transfer via Gas
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Solution Overview
Problem
In plasma processing for semiconductor manufacturing, the heat transfer efficiency between the mounting stage and the focus ring is often low, making it difficult to control the temperature of the focus ring effectively, which affects the uniformity of plasma processing and can lead to inefficient heat transfer and adhesion issues with existing heat transfer sheets.
Innovation Solution
A plasma processing apparatus with a focus ring and mounting stage equipped with magnetic members and a heat transfer gas system, where magnetic O-ring members and magnetic bodies are used to enhance heat transfer efficiency and allow for variable temperature control of the focus ring by introducing a heat transfer gas between the surfaces of the focus ring and the mounting stage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a heat transfer sheet is used between the mounting stage and the focus ring, then heat transfer efficiency is improved, but the temperature of the focus ring cannot be variably controlled and adhesion issues occur
Solution Approach 1:
A heat transfer gas (such as helium or nitrogen gas) is introduced as an intermediary medium between the mounting stage and the focus ring. The gas flows through a passage formed by the magnetic members, enabling efficient heat transfer from the heated focus ring to the mounting stage while allowing variable temperature control by adjusting gas flow rate and pressure, thus resolving the contradiction between heat transfer efficiency and temperature control flexibility
Solution Approach 2:
The invention uses pneumatic principles by introducing a heat transfer gas through a passage to achieve heat transfer. By controlling the gas flow rate and pressure, the temperature of the focus ring can be variably adjusted. This pneumatic approach replaces the fixed thermal conduction of adhesive sheets with a controllable fluid-based heat transfer system, maintaining high heat transfer efficiency while enabling flexible temperature control
2Strength
If adhesive power of the heat transfer sheet is weak, then adhesion between the focus ring and mounting stage is degraded, but heat transfer efficiency cannot be maintained
Solution Approach 1:
The heat transfer gas acts as a mediator that eliminates the need for adhesive sheets. The gas flows through the passage created by magnetic members, providing both mechanical retention of the focus ring and efficient heat transfer. This resolves the contradiction by replacing the adhesive interface with a gas-based interface that simultaneously provides retention and thermal coupling
Solution Approach 2:
The invention replaces the mechanical adhesive bonding system with a magnetic retention system combined with gas-based heat transfer. The magnetic members generate attraction force to retain the focus ring, while the heat transfer gas provides thermal coupling. This substitution eliminates adhesion strength limitations while maintaining or improving heat transfer efficiency
3Productivity
If the focus ring is directly exposed to plasma, then plasma processing is performed, but the focus ring is heated to high temperature requiring efficient cooling
Solution Approach 1:
A heat transfer gas is introduced through a passage between the mounting stage and focus ring to provide active cooling. The gas absorbs heat from the plasma-exposed focus ring and transfers it to the mounting stage, which has cooling capabilities. This pneumatic cooling system enables continuous plasma processing by actively managing the temperature of the focus ring
Solution Approach 2:
The heat transfer gas serves as an intermediary that facilitates thermal energy transfer from the hot focus ring to the cooler mounting stage. This intermediary cooling mechanism allows the focus ring to maintain structural integrity during plasma processing while enabling sustained productivity through effective heat management
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves heat transfer efficiency and allows for precise control of the focus ring temperature, enhancing the uniformity of plasma processing and preventing adhesion issues, while maintaining efficient cooling and heat transfer during plasma processes.
Implementation Method 1
a plurality of magnetic members are arranged at a surface of the focus ring and a surface of the mounting stage facing opposite each other
Implementation Method 2
a temperature adjustment unit configured to adjust a temperature of the focus ring by introducing a heat transfer gas between the surface of the focus ring and the surface of the mounting stage facing opposite each other
Data Source
AI summary
A plasma processing apparatus includes a mounting stage on which a substrate is mounted, a focus ring arranged around a periphery of the mounting stage, a plurality of magnetic members arranged at a surface of the focus ring and a surface of the mounting stage facing opposite each other, and a temperature adjustment unit configured to adjust a temperature of the focus ring by introducing a heat transfer gas between the surface of the focus ring and the surface of the mounting stage facing opposite each other.