Magnetic Heating Plate Fixing for Thermal Expansion Flatness
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Solution Overview
Problem
Thermal deformation of heating plates in semiconductor manufacturing processes leads to sealing failures, causing contamination and particle sources due to fixed positions preventing compensation for expansion.
Innovation Solution
A heating unit with a fixing portion using magnetic members and position fixing pins to maintain the heating plate's flatness by allowing thermal expansion without changing its position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the heating plate position is completely fixed by fixing members, then the heating plate position stability is improved, but the thermal deformation compensation capability deteriorates
Solution Approach 1:
The fixing members are designed to be movable rather than completely fixed, allowing them to dynamically adjust their position to compensate for thermal expansion of the heating plate while maintaining position stability during normal operation
Solution Approach 2:
The fixing members can change their position parameters (location and orientation) in response to thermal deformation, enabling the system to adapt to dimensional changes in the heating plate without compromising overall position stability
2Manufacturing precision
If the heating plate position is completely fixed, then the position fixing accuracy is improved, but the sealing reliability deteriorates
Solution Approach 1:
The movable fixing members allow the heating plate to expand thermally without inducing stress that would compromise sealing, while still maintaining sufficient position fixing accuracy through controlled movement within defined limits
3Stability of the object's composition
If fixing members are used to completely fix the heating plate, then the structural stability is improved, but the thermal expansion accommodation capability deteriorates
Solution Approach 1:
The fixing members are designed with movable characteristics that allow them to accommodate thermal expansion while maintaining structural stability during normal operating conditions
Solution Approach 2:
The fixing system is divided into multiple independent movable fixing members distributed around the heating plate, allowing localized thermal expansion accommodation without compromising overall structural stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents sealing failures and subsequent substrate and device defects by keeping the heating plate level during thermal deformation.
Implementation Method 1
the position of the heating plate may be fixed using a magnetic attraction of a magnetic member
Data Source
AI summary
Proposed is an apparatus for processing substrates and a facility for processing substrates including a heating unit. The heating unit includes a heating plate provided in a heating space to heat a substrate while supporting the substrate; and a fixing portion configured to fix a position of the heating plate, wherein the fixing portion includes a plurality of fixing members spaced at regular intervals along a circumference of the heating plate, and the position of the heating plate may be fixed using a magnetic attraction of a magnetic member. At this time, the center position of the heating plate is fixed by the fixing members using the attraction of the magnetic member and at the same time, even if the heating plate is thermally expanded, the heating plate may remain level.