Magnetic Memory Column Formation via Common Anodic Oxidation
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Solution Overview
Problem
The manufacturing cost of magnetic memory is increased due to the need for distinct processes to form magnetic material columns in the memory cell array region and peripheral region, where control circuits can be damaged during the anodic oxidation process, especially when located underneath the magnetic material columns.
Innovation Solution
A common process is used to form magnetic material columns that serve as both plugs in the peripheral region and memory cells in the memory cell array region, with these columns being made of the same magnetic material, allowing for a configuration where shift currents can be applied across both types of columns to connect the lower ends of the memory cell columns to the control circuit via a conductive line, reducing the need for separate processes and thus lowering manufacturing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If distinct processes are used to form magnetic material columns in the memory cell array region and peripheral region, then the control circuits can be protected from damage during anodic oxidation, but the manufacturing cost increases
Solution Approach 1:
The patent merges the formation processes of magnetic material columns in the memory cell array region and peripheral region into a single common anodic oxidation process. This is achieved by designing the peripheral region columns with the same material composition and structural characteristics as the memory cell columns, allowing both to be formed simultaneously without damaging the control circuits through proper process parameter control.
Solution Approach 2:
The magnetic material columns in the peripheral region are designed to serve dual functions: they act as connection plugs for control circuits and maintain compatibility with the memory cell array structure. This universality allows the same fabrication process to create both functional elements, eliminating the need for separate processing steps.
2Ease of manufacture
If a common process is used to form magnetic material columns in both regions, then manufacturing cost decreases, but control circuits may be damaged during the anodic oxidation process
Solution Approach 1:
The patent applies local quality by configuring magnetic material columns in the peripheral region with specific local characteristics that differ from memory cell columns. These peripheral columns are positioned and dimensioned to serve as protective structures during anodic oxidation, allowing the common process to proceed without damaging underlying control circuits while maintaining process simplicity.
3Manufacturing precision
If distinct processes are used for forming magnetic material columns, then manufacturing precision can be maintained, but device complexity increases
Solution Approach 1:
The patent segments the substrate into memory cell array region and peripheral region, with each region's magnetic material columns configured for their specific functions. This segmentation allows a single anodic oxidation process to create differently positioned and dimensioned columns simultaneously, maintaining precision for each region while avoiding the complexity of multiple separate processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the formation of magnetic memory at a lower cost by utilizing a common process for both types of magnetic material columns, reducing the risk of damage to control circuits and simplifying the manufacturing process, thereby lowering overall production costs.
Implementation Method 1
the anodic oxidation process, which is used to form the columns
Data Source
AI summary
A magnetic memory included a conductive line that extends in a first direction along a substrate. A first columnar body is in a memory cell array region of the substrate and extends in a second direction from the substrate. A first end of the first columnar body contacts the conductive line. The first columnar body is comprised of a first magnetic material and has magnetic domains adjacent to one another along a length of the first columnar body in the second direction. A second columnar body is in a peripheral region of the substrate and extending in the second direction from the substrate. A first end of the second columnar body contacts the conductive line, and a second end is connected to a control circuit. The second columnar body also is comprised of the first magnetic material.