Magnetic Memory Cell Layout With Spin Injection and Precise Etching

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Solution Overview

Problem

Existing magnetic memory devices face challenges in optimizing the arrangement and manufacturing process of magnetoresistive effect elements to enhance data storage efficiency and reliability.

Innovation Solution

A magnetic memory device configuration featuring a specific arrangement of conductors and magnetoresistive effect elements with a tapered cross-sectional shape and uniform insulator heights, utilizing a spin injection write system to control magnetization states, and a manufacturing method involving ion beam etching to achieve precise element formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If magnetoresistive effect elements are arranged with conductors in a conventional configuration, then device complexity is reduced, but data storage efficiency and reliability deteriorate

Engineering Contradiction:
Improvedata storage reliabilityVSAvoidconductor arrangement complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The device divides the memory structure into multiple independent layer stacks (first layer stack with first magnetoresistive effect element, second layer stack with second magnetoresistive effect element, third layer stack with third magnetoresistive effect element), each arranged between specific conductors. This segmentation allows independent optimization of each memory cell while maintaining overall system reliability through distributed architecture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a three-dimensional arrangement where layer stacks are stacked vertically between conductors extending in different directions (first conductor and second conductor extend in first direction, third conductor and fourth conductor extend in second direction). This vertical stacking in the third dimension increases storage density without proportionally increasing planar footprint, thereby improving data storage efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If ion beam etching is used to form magnetoresistive effect elements, then manufacturing precision is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveelement formation precisionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent employs ion beam etching as a preliminary manufacturing step to precisely form the magnetoresistive effect elements and insulator structures before subsequent assembly and connection steps. This preliminary precision formation ensures that critical dimensions and alignments are established early, reducing the need for complex corrective operations in later manufacturing stages.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances data storage efficiency and reliability by optimizing the arrangement and manufacturing process of magnetoresistive effect elements, enabling stable low and high resistance states for improved data retention and access.

Implementation Method 1

a magnetic memory device adopting a magnetoresistive effect element as a memory element

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Implementation Method 2

utilizing a spin injection write system to control magnetization states

Methodology Applied
Scientific EffectSpin injection:

Implementation Method 3

a manufacturing method involving ion beam etching to achieve precise element formation

Methodology Applied
Scientific EffectIon beam etching: Ion Beam

Data Source

PatentUS12520499B2Magnetic memory device and manufacturing method of magnetic memory device
Publication Date: 2026.01.06 KIOXIA CORP
  • US12520499B2 patent drawing
  • US12520499B2 patent drawing
  • US12520499B2 patent drawing

AI summary

According to one embodiment, a magnetic memory device comprises a first conductor, a second conductor, a third conductor, a fourth conductor, a first layer stack, a second layer stack, and a third layer stack. The first layer stack, the second layer stack, and the third layer stack are arranged between the first conductor and the third conductor, between the first conductor and the fourth conductor, and between the second conductor and the third conductor, respectively. A height from a first portion to a first plane and a height from a second portion to the first plane are within a first range, the first portion being between the first layer stack and the third layer stack, and the second portion being between the second layer stack and the third layer stack.