Magnetic Probe Exchange System for Scanning Probe Microscopes

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Scanning probe microscopes face challenges in efficiently and reliably exchanging probes, particularly in vacuum environments, due to issues like contamination, uncontrolled probe movement, and complex alignment processes, which can damage components and restrict usage options.

Innovation Solution

A probe system with a receptacle apparatus and probe storage that utilize magnetic forces for releasable connections, ensuring controlled alignment and movement through intermittent overlap of connections, and the use of permanent magnets and soft ferromagnetic materials to maintain probe positioning without active mechanical components, allowing for cost-effective production and simple operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a magnetic holder is used to anchor the probe to the probe holder, then the probe can be held firmly, but particles are released due to uncontrolled jerky movement, causing contamination

Engineering Contradiction:
Improveholding forceVSAvoidcontamination
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical jerky movement system with an electromagnetic field-based holding system. The electromagnetic holder uses controlled electromagnetic forces to hold and release the probe, eliminating the uncontrolled mechanical impacts that cause particle release and contamination.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the holding mechanism from mechanical contact with fixed strength to electromagnetic control where the holding force can be adjusted by varying the electromagnetic field strength. This allows for gentle, controlled release of the probe without sudden movements that would generate particles.

Inventive Principle:
Principle #35Parameter changes

2Object-affected harmful factors

If an adjustable electromagnetic holder is used instead of a magnetic holder, then particle release is avoided, but the device complexity increases

Engineering Contradiction:
ImprovecontaminationVSAvoidholder complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The electromagnetic holder serves multiple functions: it holds the probe firmly during operation, releases the probe controllably for exchange, and can be integrated with the probe storage system. This multi-functionality reduces the need for separate mechanical release mechanisms, offsetting the added electromagnetic control complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If permanent magnets are moved in the vertical direction to establish differential magnetic force, then probe transfer is achieved, but the movement mechanism becomes complicated and requires accurate teach-in

Engineering Contradiction:
Improveprobe transfer capabilityVSAvoidmovement mechanism complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent extracts the permanent magnets from the moving mechanism and fixes them in the probe storage. Only the probe storage unit itself moves vertically, while the magnets remain stationary. This eliminates the need for complex mechanisms to move the magnets and removes the teach-in requirement for magnet positioning.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a soft ferromagnetic material as an intermediary between the stationary permanent magnets and the probe. This intermediary is attracted by the magnetic field and transfers the probe during the exchange process, simplifying the overall mechanism by eliminating the need to move the magnets themselves.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Productivity

If probe arrays are used to enable quick probe replacement, then exchange speed is improved, but the production becomes complicated and spatial requirements increase

Engineering Contradiction:
Improveprobe exchange speedVSAvoidproduction complexity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent segments the probe storage into multiple individual storage units that can hold separate probes. Each unit operates independently with its own electromagnetic holder, allowing selective access to individual probes without requiring complex array mechanisms. This maintains quick exchange capability while simplifying production.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution minimizes contamination, maintains probe alignment during transfer, and allows for regulated and efficient probe exchange processes, reducing the risk of damage and operational complexity.

Implementation Method 1

the first connection and/or the second connection use a magnetic force

Methodology Applied
Scientific EffectMagnetic force: Magnetism

Implementation Method 2

the receptacle apparatus and the probe storage have at least one permanent magnet, wherein the probe has at least one soft ferromagnetic material

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Data Source

PatentUS10578644B2Probe system and method for receiving a probe of a scanning probe microscope
Publication Date: 2020.03.03 CARL ZEISS SMT GMBH
  • US10578644B2 patent drawing
  • US10578644B2 patent drawing
  • US10578644B2 patent drawing

AI summary

The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.