Magnetic Sensor Ion-Beam Etching for Shorting and Anisotropy
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Solution Overview
Problem
Magnetoresistive elements disposed on inclined surfaces face issues such as shorting between side surfaces and the upper electrode and reduced magnetic shape anisotropy due to gentle taper angles, which affect the performance of magnetic sensors.
Innovation Solution
The magnetic sensor design includes a support member with inclined surfaces and magnetic detection elements having side surfaces with distinct angles, formed through ion beam etching to minimize shorting and maintain magnetic shape anisotropy, with a manufacturing method that tilts the ion beam direction relative to the reference plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the taper angle of the magnetoresistive element side surfaces is made gentle, then the area where the side surfaces face the upper electrode increases, but the magnetoresistive element may become shorted to the upper electrode
Solution Approach 1:
The side surfaces of the magnetoresistive element are designed with different taper angles in different regions. The first side surface has a first taper angle while the second side surface has a second taper angle, creating local variations in geometry to prevent shorting while maintaining necessary electrode contact area
Solution Approach 2:
The magnetoresistive element employs asymmetric side surface configurations where the first and second side surfaces have different taper angles. This asymmetry prevents the side surfaces from being parallel to the upper electrode, thereby eliminating the shorting risk while preserving functional contact areas
2Reliability
If the taper angle of the magnetoresistive element side surfaces is made gentle, then the magnetic shape anisotropy decreases, but the magnetic performance is compromised
Solution Approach 1:
Different regions of the magnetoresistive element are given different taper angles to optimize both magnetic shape anisotropy and electrical insulation. The first and second side surfaces have different taper angles that are specifically designed to maintain magnetic performance while preventing shorting
Solution Approach 2:
The patent changes the geometric parameters (taper angles) of the side surfaces to optimize the balance between magnetic shape anisotropy and shorting prevention. By carefully selecting different taper angles for different side surfaces, the magnetic performance is maintained while electrical insulation is improved
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses problems associated with side surface shapes, reducing shorting and maintaining magnetic anisotropy, thereby enhancing the performance and reliability of the magnetic sensor.
Implementation Method 1
a side surface forming for forming the first side surface and the second side surface on the initial magnetic detection element by etching the initial magnetic detection element with ion beam etching
Data Source
AI summary
A manufacturing method for a magnetic sensor includes forming a support member and forming a magnetic detection element. The forming the magnetic detection element includes: forming an initial magnetic detection element, and a side surface forming for forming a first side surface and a second side surface on the initial magnetic detection element by etching the initial magnetic detection element with ion beam etching. In at least a part of the side surface forming, a direction of an ion beam is tilted with respect to a direction perpendicular to a reference plane.