Magnetic Sensor Matrix with Flux Regulators for Wide Range Sensitivity
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Solution Overview
Problem
Current magnetic sensors face challenges in simultaneously achieving high sensitivity and wide detection range due to mutual constraints between sensitivity and range, particularly evident in Hall elements and TMR elements.
Innovation Solution
A wide-range perpendicular sensitive magnetic sensor is developed, incorporating a substrate with multiple magnetic tunnel junctions and magnetic flux regulators, arranged in specific configurations to form push-pull Wheatstone full-bridge structures, allowing for enhanced and attenuated magnetic induction intensity, thereby expanding both sensitivity and range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Hall elements are used as sensitive elements with magnetism gathering annular structure, then magnetic field amplification is achieved, but sensitivity remains low
Solution Approach 1:
The patent divides the magnetic sensor into multiple independent magnetic tunnel junction units arranged in a matrix, with each unit capable of independent detection. This segmentation allows parallel processing of magnetic field measurements, significantly improving both sensitivity and detection capability without the limitations of single-element Hall sensors
Solution Approach 2:
The patent employs composite magnetic tunnel junction structures combining ferromagnetic layers, tunnel barriers, and antiferromagnetic layers. This composite material approach enables simultaneous achievement of high sensitivity through TMR effect and robust detection capability, overcoming the low sensitivity issue of Hall elements
2Measurement precision
If TMR element size is reduced to improve sensitivity, then detection precision increases, but detection range is constrained
Solution Approach 1:
The patent transitions from single-point detection to two-dimensional matrix array detection. By arranging multiple small-sized TMR elements in a matrix with magnetic flux regulators at intervals, the system achieves both high sensitivity (from small element size) and wide detection range (from array coverage), effectively resolving the size-range tradeoff
Solution Approach 2:
The patent introduces magnetic flux regulators as intermediary components between the TMR elements and external magnetic fields. These regulators amplify and distribute magnetic field lines to multiple small TMR elements, enabling each element to maintain small size for high sensitivity while the collective array achieves wide detection range through the mediating flux regulators
3Measurement precision
If magnetic flux regulators are placed directly above magnetic tunnel junctions, then magnetic induction is enhanced, but structural complexity increases
Solution Approach 1:
The patent applies magnetic flux regulators selectively at specific positions in the matrix array, particularly at edge and corner positions where magnetic field distribution requires enhancement. This localized application approach improves magnetic induction intensity where needed while avoiding unnecessary complexity in regions where simple detection suffices
Solution Approach 2:
The magnetic flux regulators serve multiple functions: they enhance magnetic induction intensity for improved sensitivity, provide structural support for the array configuration, and enable compact integration of multiple TMR elements. This multi-functionality reduces overall device complexity by consolidating several functions into single components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves high sensitivity and wide detection range simultaneously, overcoming the limitations of existing technologies by improving detection accuracy and expanding the upper and lower detection limits.
Implementation Method 1
tunneling magnetoresistive (TMR) elements
Implementation Method 2
magnetic flux regulators to amplify the magnetic field
Implementation Method 3
push-pull Wheatstone full-bridge structures
Data Source
AI summary
The present disclosure relates to a wide-range perpendicular sensitive magnetic sensor and the method for manufacturing the same, the magnetic sensor includes a substrate, a plurality of magnetic tunnel junctions, a plurality of magnetic flux regulators, a first output port and a second output port.


