Magnetic Substrate Holder Locking for Cleaner Wet Processing

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Solution Overview

Problem

Existing substrate holders require a mechanism for fixing first and second holding members in a contact manner, which complicates the design and increases the risk of processing solution adherence and cleaning difficulties, especially for non-circular substrates.

Innovation Solution

A substrate holder design that fixes first and second holding members using a magnetically operated engaging member, allowing non-contact engagement and disengagement, thereby reducing the need for external passages and simplifying the design while minimizing processing solution adherence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a contact mechanism (rod member extending from exterior to inner space) is used to fix the first and second holding members, then the fixing function is achieved, but a passage is required which decreases design freedom and complicates the structure

Engineering Contradiction:

Improvestructure complexityVSAvoiddesign freedom

Core Design Contradiction:

Device complexityVSEase of operation

Solution Approach 1:

The patent replaces the mechanical rod member system with a magnetic field-based engagement system. The engaging member includes a magnet that is movable by magnetic force between locked and unlocked positions, eliminating the need for mechanical passages and rod members extending from the exterior to the inner space, thereby simplifying the overall structure and increasing design freedom

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a magnetic field as an intermediary to transmit the engagement force without requiring physical contact or passages. The magnet in the engaging member interacts with the engaged member through magnetic attraction, allowing the fixing mechanism to operate without mechanical connections that would require passages

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of manufacture

If a contact mechanism with passages is used, then the fixing function is achieved, but the processing solution can adhere to the mechanism parts, increasing cleaning difficulty

Engineering Contradiction:

Improvecleaning easeVSAvoidmechanism structure

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical contact mechanism with a magnetic field-based system where the engaging member is movable by magnetic force. This eliminates the need for passages that would require cleaning, as the magnetic engagement components can be positioned to minimize exposure to processing solution or designed as sealed units

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If a rod member extending from exterior to inner space is used, then the engaging mechanism can be operated, but the passage required for the rod member decreases design freedom

Engineering Contradiction:

Improvedesign flexibilityVSAvoidpassage requirement

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent substitutes the rod member mechanical system with a magnetic engagement system. The magnet in the engaging member can be actuated by magnetic force from the exterior without requiring a physical passage through the holder body, allowing greater design flexibility for the holder structure while maintaining the ability to operate the engagement mechanism

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The non-contact engagement mechanism reduces processing solution adherence and simplifies cleaning, maintaining design flexibility for various substrate shapes and sizes, and enhances the efficiency of substrate processing.

Implementation Method 1

the engaging member (246) includes a magnet (254) and is movable, by a magnetic force that acts on the magnet (254), between a locked position at which the engaging member (246) engages with the engaged member (230)

Methodology Applied

Scientific EffectMagnetic force: Magnetism

Data Source

PatentUS20250313982A1Substrate holder and substrate processing apparatus

Publication Date: 2025.10.09 EBARA CORP

AI summary

The present disclosure provides a substrate holder configured such that a mechanism for fixing a first holding material and a second holding material to each other can be operated in a non-contact manner. The substrate holder according to the present disclosure includes a first holding material, a second holding material for sandwiching and holding a substrate together with the first holding material, an engaging member provided on one of the first holding material and the second holding material, and an engaged member fixed to the other of the first holding material and the second holding material, the engaging member includes a magnet and is configured to be movable, by a magnetic force that acts on the magnet, between a locked position at which the engaging member engages with the engaged member to fix the first holding material and the second holding material to each other, and an unlocked position at which the engagement of the engaging member and the engaged member is released to release the fixing of the first holding material and the second holding material.