Magnetic Substrate Transfer Path Correction for Route Deviation
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Solution Overview
Problem
Existing substrate transfer systems face challenges in accurately moving substrates along preset routes due to deviations caused by various error factors, such as misalignment of magnetic fields and mechanical components, leading to potential collisions and reduced efficiency.
Innovation Solution
A substrate transfer device that utilizes a movement tile with adjustable magnetic fields and a substrate transfer module with a magnet that floats on the magnetic field, allowing for precise control of the substrate's movement path. The system includes a detector to measure deviations from the preset route and a correction mechanism to adjust the magnetic field based on calculated correction parameters, ensuring accurate substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If magnetic field control is used to move the substrate transfer module, then the substrate can be transferred without mechanical contact, but deviations from the preset route occur due to magnetic field misalignment and other error factors
Solution Approach 1:
The system employs detectors to monitor the actual position of the substrate transfer module during movement and feeds this information back to the controller. The controller compares the detected position with the preset route and dynamically adjusts the magnetic field strength and distribution to correct deviations, ensuring the module stays on the intended trajectory despite initial misalignments or external disturbances.
Solution Approach 2:
The system dynamically changes the parameters of the magnetic field (strength, distribution, polarity) in real-time based on the detected position of the substrate transfer module. By adjusting these magnetic field parameters, the system compensates for route deviations and maintains precise control over the module's movement path without mechanical contact.
2Productivity
If the substrate transfer module moves at higher speeds, then productivity increases, but the risk of collisions and route deviations increases
Solution Approach 1:
The detectors continuously monitor the position and movement state of the substrate transfer module at high speeds, providing real-time feedback to the controller. This enables the system to detect and correct route deviations immediately, maintaining safe operation even at higher transfer speeds and preventing collisions.
Solution Approach 2:
The magnetic field control system dynamically adapts to the high-speed movement of the substrate transfer module by continuously adjusting field parameters in real-time. This dynamic control allows the system to maintain precise route following and safe operation speeds, enabling higher productivity without increasing collision risk.
3Manufacturing precision
If correction parameters are calculated and applied in subsequent transfers, then route precision improves, but the system complexity increases
Solution Approach 1:
The system calculates correction parameters based on detected deviations and applies them in subsequent transfers before new deviations occur. This preliminary correction approach improves route precision in future operations without requiring complex real-time calculations during each transfer, thereby limiting the increase in system complexity.
Solution Approach 2:
The system uses its own detection and control capabilities to automatically calculate and apply correction parameters without external intervention. This self-correcting mechanism improves route precision while keeping the control system relatively simple, as the same existing detectors and controllers are used for both monitoring and correction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves more accurate and efficient substrate transfer by minimizing deviations from the preset route, reducing the risk of collisions, and enabling higher-speed operations while maintaining precision.
Implementation Method 1
a second magnet configured to receive an action of a magnetic force which is at least one of a repulsive force and an attractive force acting between a magnetic field of the plurality of first magnets and a magnetic field of the second magnet
Data Source
AI summary
A substrate transfer device is provided with: a movement tile provided in a substrate transfer region and including first magnets for changing a state of a magnetic field and a movement surface; a substrate transfer module including a second magnet that receives a magnetic force and configured to move along the movement surface while being floated from the movement surface by the magnetic force; a transfer controller for controlling the magnetic field formed by the first magnets to move the substrate transfer module along a preset route; a detector for detecting an index value corresponding to a magnitude of a deviation, from the preset route, of an actual movement path of the substrate transfer module moving along the movement surface; and a correction parameter calculation part for calculating a correction parameter for correcting the magnetic force acting on the second magnet based on the index value.