Magnetoresistance Device Buffer Layer Exchange Coupling Control

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Solution Overview

Problem

Existing magnetoresistance devices face challenges in achieving sufficiently great exchange coupling and flexible control of exchange coupling strength between ferromagnetic layers, particularly in layered ferromagnetic structures, which affects the performance of MRAMs, especially in achieving desired magnetic properties and reducing magnetic interference between memory cells.

Innovation Solution

A layered ferromagnetic structure is implemented with a first and second ferromagnetic layer separated by a non-magnetic layer, where the first ferromagnetic layer includes an orientation control buffer to enhance crystalline orientation, thereby improving exchange coupling. This structure uses specific materials like tantalum, ruthenium, and niobium for the buffer, and adjusts thickness to achieve strong ferromagnetic coupling, allowing for independent control of exchange coupling energy and anisotropic magnetic field.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a layered ferromagnetic structure is used to achieve exchange coupling between adjacent ferromagnetic layers, then magnetic properties are improved, but the exchange coupling strength is insufficient and cannot be flexibly controlled

Engineering Contradiction:
Improvemagnetic propertiesVSAvoidexchange coupling strength control
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent changes the physical and chemical parameters of the buffer layer, including its thickness (5-50 nm), material composition (oxides, nitrides, carbides of Ta, W, Mo, Hf, Zr, Nb), and crystalline orientation, to independently control the exchange coupling energy between ferromagnetic layers. This allows flexible adjustment of magnetic properties without compromising the layered structure's integrity.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces a buffer layer as an intermediary between the substrate and the first ferromagnetic layer, or between ferromagnetic layers. This buffer layer mediates the exchange coupling interaction, enabling independent control of coupling strength through its thickness and material properties, thereby resolving the contradiction between achieving sufficient coupling and maintaining flexibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-generated harmful factors

If ferromagnetic layers are separated by non-magnetic layers to form a layered structure, then magnetic interference between memory cells is reduced, but the exchange coupling between layers becomes insufficient

Engineering Contradiction:
Improvemagnetic interferenceVSAvoidexchange coupling
Core Design Contradiction:
Object-generated harmful factorsVSForce

Solution Approach 1:

The patent optimizes the thickness parameter of the non-magnetic buffer layer (5-50 nm range) to achieve the right balance: thin enough to maintain strong exchange coupling between ferromagnetic layers, but thick enough to provide electrical isolation and reduce magnetic interference between adjacent memory cells. The material composition is also adjusted to fine-tune these properties.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies different material compositions and thicknesses to different regions of the buffer layer to achieve local optimization. By tailoring the buffer layer's properties at specific locations, it simultaneously achieves strong local exchange coupling while maintaining overall magnetic isolation between memory cells.

Inventive Principle:
Principle #3Local quality

3Object-generated harmful factors

If the thickness of non-magnetic layers is increased to reduce magnetic interference, then magnetic isolation improves, but exchange coupling between ferromagnetic layers decreases

Engineering Contradiction:
Improvemagnetic interferenceVSAvoidexchange coupling
Core Design Contradiction:
Object-generated harmful factorsVSForce

Solution Approach 1:

The patent identifies and optimizes the critical parameter of buffer layer thickness, establishing the optimal range of 5-50 nm. Within this range, the buffer layer is thick enough to provide magnetic isolation but thin enough to maintain sufficient exchange coupling. The material composition is simultaneously adjusted to enhance coupling strength while preserving magnetic isolation properties.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The enhanced crystalline orientation of the non-magnetic layer leads to stronger exchange coupling between ferromagnetic layers, improving the magnetic properties of MRAMs by increasing the switching magnetic field and reducing magnetic interference, thus enhancing the reliability and performance of memory cells.

Implementation Method 1

adjacent ferromagnetic layers are antiferromagnetically coupled by the exchange coupling through the non-magnetic layer

Methodology Applied
Scientific EffectExchange coupling:

Implementation Method 2

The top surface of the first ferromagnetic layer is in contact with the first non-magnetic layer. The first ferromagnetic layer includes a first orientation control buffer that exhibit an effect of enhancing crystalline orientation of a film formed thereon

Methodology Applied
Scientific EffectCrystalline orientation:

Implementation Method 3

a first ferromagnetic layer positioned over a substrate; a second ferromagnetic layer positioned over the first ferromagnetic layer

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Implementation Method 4

The net magnetization MR of the free magnetic layer 107 can be reversed by applying the external magnetic field greater than a switching magnetic field Hc

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS8865326B2Magnetoresistance device including layered ferromagnetic structure, and method of manufacturing the same
Publication Date: 2014.10.21 NEC CORP
  • US8865326B2 patent drawing
  • US8865326B2 patent drawing
  • US8865326B2 patent drawing

AI summary

A layered ferromagnetic structure is composed of a first ferromagnetic layer positioned over a substrate; a second ferromagnetic layer positioned over the first ferromagnetic layer; and a first non-magnetic layer placed between the first and second ferromagnetic layers. The top surface of the first ferromagnetic layer is in contact with the first non-magnetic layer. The first ferromagnetic layer includes a first orientation control buffer that exhibits an effect of enhancing crystalline orientation of a film formed thereon.