Magnetoresistive Stack With Interfacial Layers

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Solution Overview

Problem

Magnetoresistive memory stacks with perpendicular magnetic anisotropy face challenges in maintaining improved magnetoresistance, resistance-area product, and delta resistance-area after processing, requiring techniques to enhance the properties of the fixed magnetic region and tunnel barrier quality.

Innovation Solution

The implementation of a magnetoresistive stack structure with a perpendicular magnetic anisotropy, featuring a fixed magnetic region and a free magnetic region separated by a dielectric layer, where the surface treatment of metal layers and the use of interfacial layers improve the tunnel barrier quality and magnetic properties, such as increased resistance-area product and magnetoresistance ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If surface treatment of metal layers and interfacial layers are used to improve tunnel barrier quality, then magnetoresistance ratio and resistance-area product increase, but device complexity and manufacturing complexity increase

Engineering Contradiction:
Improvetunnel barrier qualityVSAvoidstack structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

An interfacial layer is introduced between the fixed magnetic region and the tunnel barrier as an intermediary element. This interfacial layer mediates the interaction between the metal layer and dielectric layer, improving tunnel barrier quality and magnetoresistance ratio while managing the complexity through a defined functional interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Surface treatment of metal layers and modification of interfacial layer properties are used to change physical and chemical parameters at the interfaces. These parameter changes improve tunnel barrier quality, resistance-area product, and magnetoresistance ratio by optimizing interfacial characteristics.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If additional processing steps are applied to enhance fixed magnetic region properties, then magnetoresistance and resistance-area product improve, but time consumption and processing duration increase

Engineering Contradiction:
Improvemagnetoresistance stabilityVSAvoidprocessing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The interfacial layer and surface treatments are applied during the initial stack formation process rather than as separate post-processing steps. This preliminary action integrates quality enhancement into the manufacturing flow, improving magnetoresistance stability without adding significant processing time.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If tunnel barrier quality is enhanced through interfacial layers, then time-dependent dielectric breakdown characteristics improve, but manufacturing complexity increases

Engineering Contradiction:
Improvedielectric breakdown resistanceVSAvoidmanufacturing simplicity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The interfacial layer serves as a mediator between the fixed magnetic region and tunnel barrier, improving time-dependent dielectric breakdown characteristics by creating a more stable interface. This intermediary structure manages manufacturing complexity by providing a defined functional boundary.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The stack structure employs composite material layers including the interfacial layer, fixed magnetic region, and tunnel barrier. This composite approach enhances dielectric breakdown resistance through material synergies while organizing complexity into distinct functional components.

Inventive Principle:
Principle #40Composite materials

4Reliability

If perpendicular magnetic anisotropy is maintained in the fixed magnetic region, then magnetoresistive device performance is preserved, but flexibility in material selection and processing is reduced

Engineering Contradiction:
Improvemagnetic anisotropy stabilityVSAvoidmaterial selection flexibility
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The fixed magnetic region is designed with specific local quality characteristics including perpendicular magnetic anisotropy and controlled magnetization direction. This local quality optimization ensures magnetic stability while allowing flexibility in other regions of the stack for material selection and processing variations.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved tunnel barrier performance, enhanced time-dependent dielectric breakdown characteristics, and increased spin-transfer torque switching efficiency without compromising perpendicular magnetic anisotropy or exchange coupling, leading to more reliable and efficient magnetoresistive devices.

Implementation Method 1

The magnetoresistive memory stack/structure includes an electrical resistance that depends on the magnetic state of certain regions of the memory stack/structure

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Implementation Method 2

the direction of the magnetization vectors of the 'free' magnetic region may be switched and/or programmed (for example, through spin transfer torque or spin orbit torque) by application of a write signal

Methodology Applied
Scientific EffectSpin transfer torque:

Implementation Method 3

a magnetoresistive memory stack/structure having a perpendicular magnetic anisotropy, wherein the fixed magnetic region maintains or includes improved properties

Methodology Applied
Scientific EffectPerpendicular magnetic anisotropy: Anisotropy

Data Source

PatentUS10811597B2Magnetoresistive stack/structure and methods therefor
Publication Date: 2020.10.20 EVERSPIN TECHNOLOGIES INC
  • US10811597B2 patent drawing
  • US10811597B2 patent drawing
  • US10811597B2 patent drawing

AI summary

A magnetoresistive device with a magnetically fixed region having at least two ferromagnetic regions coupled together by an antiferromagnetic coupling region. At least one of the two ferromagnetic regions includes multiple alternating metal layers and magnetic layers and one or more interfacial layers. Wherein, each metal layer includes at least one of platinum, palladium, nickel, or gold, and the interfacial layers include at least one of an oxide, iron, or an alloy including cobalt and iron.