Mask Assembly Inner Area Overlap for Deposition Precision

Solution Overview

Problem

Existing mask assemblies for manufacturing display devices face challenges in deposition precision and dead spaces, leading to defects and reduced display quality due to manufacturing process tolerances and inadequate adhesion between the mask and substrate.

Innovation Solution

A mask assembly design featuring a first mask with first openings and a second mask having a deposition area with second openings, an inner area, and an outer area, where the inner area overlaps the boundary lines of the first openings, enhancing deposition precision and adhesion, thereby reducing dead spaces and improving display quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional mask assembly with single mask structure is used, then the manufacturing process is simple, but the deposition precision is poor and dead spaces are generated

Engineering Contradiction:

Improvedeposition precisionVSAvoidmask assembly structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask assembly is divided into multiple masks (first mask, second mask, third mask) with distinct functions. The first mask defines the overall pattern, the second mask creates the deposition area with precise openings, and the third mask provides adhesion. This segmentation allows each mask to be optimized for its specific function, thereby improving deposition precision while maintaining manageable complexity through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the mask assembly are designed with different properties. The second mask has a deposition area with precise openings for accurate material deposition, an inner area for adhesion, and an outer area with additional openings. This local differentiation ensures that each region contributes optimally to the overall deposition precision and quality.

Inventive Principle:

Principle #3Local quality

2Reliability

If the mask assembly lacks an inner area structure, then the structure is simpler, but adhesion between mask and substrate is insufficient

Engineering Contradiction:

Improveadhesion between mask and substrateVSAvoidmask area structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The mask assembly is divided into multiple masks (first mask, second mask, third mask) with distinct functions. The first mask defines the overall pattern, the second mask creates the deposition area with precise openings, and the third mask provides adhesion. This segmentation allows each mask to be optimized for its specific function, thereby improving deposition precision while maintaining manageable complexity through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the mask assembly are designed with different properties. The second mask has a deposition area with precise openings for accurate material deposition, an inner area for adhesion, and an outer area with additional openings. This local differentiation ensures that each region contributes optimally to the overall deposition precision and quality.

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If conventional mask design without inner area overlap is used, then the design is simpler, but deposition precision deteriorates due to boundary line misalignment

Engineering Contradiction:

Improvedeposition precisionVSAvoidmask configuration

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask assembly is divided into multiple masks (first mask, second mask, third mask) with distinct functions. The first mask defines the overall pattern, the second mask creates the deposition area with precise openings, and the third mask provides adhesion. This segmentation allows each mask to be optimized for its specific function, thereby improving deposition precision while maintaining manageable complexity through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the mask assembly are designed with different properties. The second mask has a deposition area with precise openings for accurate material deposition, an inner area for adhesion, and an outer area with additional openings. This local differentiation ensures that each region contributes optimally to the overall deposition precision and quality.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The improved mask assembly design enhances deposition precision, reduces dead spaces, and increases the adhesive force between the mask and substrate, resulting in higher display quality and reliability.

Implementation Method 1

a deposition source to spray a deposition material to the base substrate through the first openings

Methodology Applied

Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS20230119614A1Mask assembly and deposition apparatus of the same

Publication Date: 2023.04.20 SAMSUNG DISPLAY CO LTD

AI summary

A mask assembly includes a first mask having a first opening and at least one second mask disposed on the first mask, each at least one second mask including a deposition area having second openings, an inner area surrounding the deposition area, and an outer area having third openings which surround the margin area. A line defining the outer boundary of an inner surface which defines the first opening overlaps the inner area when viewed in plan.