Mask Frame Assembly With Patterned Support Ribs
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Solution Overview
Problem
Existing mask frame assemblies for thin film deposition face challenges in achieving precise patterning and adhesion, particularly due to foreign substances adhering to the support structure, which can disrupt the deposition process and lead to defects in the thin film formation.
Innovation Solution
The proposed mask frame assembly includes a support structure with ribs and patterned portions of varying thickness, where the patterned portions are etched to create spaces for foreign substance removal and enhance adhesion between the mask and the deposition substrate, ensuring accurate patterning and preventing the mask from sinking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a solid support structure is used to hold the mask, then mechanical strength and stability are improved, but foreign substances can adhere to the support surface causing deposition defects
Solution Approach 1:
The support structure incorporates through-holes creating a porous configuration that allows deposition material to pass through. This prevents foreign substance accumulation on the support surface while maintaining mechanical integrity through the ribbed framework. The porous design enables the support to fulfill its structural function without becoming a source of contamination.
Solution Approach 2:
The invention extracts the problematic solid surface area of the support by creating through-holes, removing the portions where foreign substances would adhere. The remaining rib structure provides necessary mechanical strength while the extracted spaces eliminate the contamination source.
2Object-affected harmful factors
If the support structure is made thinner to reduce interference with deposition, then foreign substance adhesion is reduced, but the mask may sink or lack proper support
Solution Approach 1:
The through-holed porous structure reduces the effective surface area where foreign substances can adhere, while the strategically positioned ribs maintain sufficient mechanical support. The porous configuration allows the support to be effectively 'thinner' in terms of contamination risk while preserving structural capability.
Solution Approach 2:
The support is segmented into multiple ribs rather than a solid continuous structure. This segmentation reduces the overall material presence that could harbor foreign substances, while each rib provides localized support to prevent mask sinking. The distributed rib structure achieves support with minimal interference.
3Ease of manufacture
If a solid support structure is used, then manufacturing simplicity is maintained, but precise patterning is compromised due to foreign substance interference
Solution Approach 1:
The support structure is segmented with through-holes that can be created using standard manufacturing processes like drilling or laser perforation. This segmentation improves patterning precision by eliminating foreign substance interference, while the overall manufacturing approach remains relatively simple and scalable.
Solution Approach 2:
Creating a porous structure with through-holes is achieved through conventional manufacturing techniques. The porous design significantly improves patterning precision by preventing foreign substance adhesion, while adding minimal complexity to the manufacturing process.
4Ease of manufacture
If the support has uniform thickness, then manufacturing is simplified, but adhesion between mask and substrate is insufficient
Solution Approach 1:
The support structure features varying local qualities with ribs of different thicknesses and strategic through-hole placement. This local variation enhances adhesion by creating optimal contact points between the mask and substrate, while the overall design remains manufacturable using standard processes.
Solution Approach 2:
The porous configuration with through-holes creates localized adhesion zones where deposition material can properly bond the mask to the substrate. This porous design improves adhesion reliability while maintaining reasonable manufacturing simplicity.
Data Source
AI summary
Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.