Mask Plate Segmentation for High PPI OLED Displays
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Solution Overview
Problem
Current Fine Metal Mask (FMM) technology is limited in achieving high Pixel Per Inch (PPI) values above 400, which is insufficient for modern display requirements, particularly in micro-displays where higher resolution is needed to meet human visual demands.
Innovation Solution
A mask plate with a metal mask plate body and an insulation film featuring second openings that project within corresponding first openings, allowing for precise patterning and evaporation of light-emitting materials to form subpixels, enabling higher PPI values through improved etching precision and arrangement of subpixels in an array form.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional Fine Metal Mask (FMM) is used for evaporating light-emitting materials, then the manufacturing process is simple and direct, but the PPI value is limited to up to 400 due to FMM precision limitations
Solution Approach 1:
The mask plate is divided into two distinct layers: a metal mask plate body with first openings and an insulation film with second openings. This segmentation allows each layer to serve a specific function - the metal layer provides structural support and initial patterning, while the insulation film enables higher precision patterning for subpixels, thereby achieving PPI values above 400 without overwhelming device complexity
Solution Approach 2:
The invention transitions from a single-plane mask structure to a multi-layer stacked structure. By adding the insulation film layer above the metal mask plate body and positioning second openings to align with first openings, the system achieves higher precision in the vertical dimension while maintaining the horizontal patterning capability, enabling PPI > 400
2Manufacturing precision
If the pitch between adjacent subpixels is reduced to increase PPI value, then display resolution improves, but shadow effects and cross-color issues increase
Solution Approach 1:
The insulation film acts as an intermediary layer between the metal mask plate body and the substrate. It provides electrical isolation and mechanical support, allowing the second openings to be precisely positioned within the first openings. This intermediary structure enables accurate subpixel patterning with reduced pitch while preventing shadow effects and cross-color contamination through proper isolation
Solution Approach 2:
The mask plate structure provides different properties at different locations and layers: the metal mask plate body provides robust structural support and first-level patterning, while the insulation film provides precise second-level patterning and electrical isolation. This local differentiation allows each layer to optimize for its specific function, achieving high PPI without compromising display quality
Data Source
AI summary
The present disclosure in some embodiments provides a mask plate, including: a metal mask plate body provided with a plurality of first openings; and an insulation film arranged on the metal mask plate body and provided with a plurality of second openings. An orthogonal projection of at least one second opening in the plurality of second openings onto the metal mask plate body falls within the corresponding first opening or first openings.